Recently, with the development of the space, mobility, semiconductor, and precision machinery industries, the processing of precision mechanical parts has been recognized as an important and a high value-added technology. Research on ultra-precision processing is actively underway to produce such products. In addition, eco-friendliness and 0% carbon are emerging as key keywords in modern industrial society, and the need for this is also increasing in the ultra-precision processing field. As the industry advances, environmental issues are becoming a major concern, and in the processing technology field, environmental destruction caused by cutting oil is becoming an issue. To solve this problem, this study measured the movement precision of the global feed system and instaled a Fine Servo that corrects the nm-level movement of the feed system in real time, using a piezoelectric actuator, to finely drive the cutting tool to control the movement necessary for machining. We intended to control variables for ultra-precision machining and measure cutting heat generation in real time to establish a dry cooling method using thermoelectric elements without using cutting oil.

In the framework of the 4th industrial revolution, modern machine building rapidly converges with IOT technology. This requires a very high level of precision machining of parts and assemblies, such as electronics, vehicle and components, agricultural and construction machines, optical instruments, and machine tools. However, high precision machinery is considerably expensive, and so a general need for low-cost equipment exists. While many researchers study this, they focus mainly on cutting tools. This study, for its part, focused on compensating errors and enhancing machinery precision, by adding a servo controller to the processing unit. As a result, we designed a fine dual servo system, ensuring 10 nm positioning accuracy and 40 nm of surface roughness.

In the framework of the 4th industrial revolution, modern machine-building rapidly converges with IOT technology. This requires very high precision machining of the parts and assemblies, such as electronics, vehicle and components, agricultural and construction machines, optical instruments, and machine tools. However, high precision machinery is quite expensive, and there exists a general need for low-cost equipment. While many researchers are working on this, their major focus is on cutting tools. This study aimed to compensate for errors and enhance machinery precision by adding a servo controller to the processing unit. Consequently, the study is on servo control and processing precision for processing utilizing ECTS (Error Compensation Tool Servo) to compensate for errors.

This study investigated the role of multi-layer lever type flexure hinges for high magnification of piezoelectric actuators and their optimal design. In order to obtain a displacement higher than 700 μm with a common PZT actuator of displacement less than 15 μm, the magnification ratio of a flexure hinge must be at least 50 or higher. Under a limited compact space, a multi-layer lever structure represents a useful alternative. Restricting the important design parameters to the number of layers and rotational stiffness of notch, the maximum required input displacement/force and the maximum output displacement were analyzed according to the number of layers. The two-layer structure was selected as the best option for large magnification ratio because the required input displacement was drastically reduced. FEM analysis revealed that the lever thickness should be larger than 12 mm to exhibit a rigid body behavior. The output displacement was 664 μm, which was less than 704 μm expected in the design stage. It might be attributed to elastic deformation of the notches of 1st and 2nd layers, which was not considered in the design stage.

The goal of this study is to develop a fast, controllable PZT-driven depth adjustment device with a flexure hinge. The device can be used to trace rapidly a flat or curved surface with several hundreds of micrometers’ variance in height. The lever type flexure hinge designed for a magnification ratio of 10 and no other axes motion has been confirmed through FEM analysis; the actual performance has been verified through static/dynamic experiments. A micro-depth control system, which is comprised of a DAQ with a LabVIEW, PZT amplifier, PZT actuator, flexure hinge, and laser displacement sensor, is implemented, and its static/dynamic characteristics of depth control is investigated with a PID gain tuned control algorithm on LabVIEW. It has been verified that the developed device can trace a micro-depth command as fast as 0.5 s to get an accurate position of 0.1 μm, even under a load of 1 N.