A new technique based on the reversal method, is suggested to measure squareness error of the two-linear axes system. The technique uses the L-type steel bar, a capacitive sensor, and three experimental installations required to measure squareness error and two horizontal straightness errors. Profile and squareness of the L-type steel bar are estimated, by using the principle of the reversal method. Also, setup errors inevitable at installation, are separated from measured data using the least square method. Multi-DOF errors of two-linear axes system are measured and analyzed, using the suggested technique. Also, the reference mirror with flatness of 30 nm is used to verify the suggested measurement technique. Difference between the two measurement methods is 3.25 arcsec, a value within measurement repeatability.

UVW Stage is widely used in manufacturing processes of PCB, LCD, OLED, and semiconductor industries. The precision of UVW Stage is closely associated with the quality of products. Two approaches for kinematics of UVW Stage are proposed for comparative analysis. Program of proposed kinematics algorithm is developed for motion control and applied to UVW Stage driving. The position of the stage for each algorithm is sequentially measured by laser interferometer. Both virtual stage and real stage are used for accuracy analysis. The performance of each algorithm is evaluated based on this accuracy analysis.