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"지르코니아"

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"지르코니아"

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Pinhole Detection in Thin Film Solid Oxide Electrolytes Using Selective Adsorption of Ag Nanoparticles via a Spark Discharge Generator
Doyoon Kim, Ikwhang Chang, Jong Dae Baek
J. Korean Soc. Precis. Eng. 2025;42(6):441-446.
Published online June 1, 2025
DOI: https://doi.org/10.7736/JKSPE.025.024
Pinhole-free ionic conductors are critical to achieve optimal performance in thin film-solid oxide fuel cells (TF-SOFCs). However, nanoscale defects, especially pinholes, can induce current leakage and contribute to cell failure by creating electrical short circuits. This study introduced a novel methodology for detecting pinholes in yttria-stabilized zirconia (YSZ) thin-film solid oxide electrolytes. The approach utilized selective adsorption of silver (Ag) nanoparticles generated via a spark discharge generator (SDG). Analytical techniques, including focused ion beam (FIB), scanning electron microscopy (SEM), and transmission electron microscopy (TEM), were employed to investigate interactions between Ag nanoparticles and nanoscale defects. Results showed that nanoparticle-based diagnostic methods were efficacious for defect characterization, offering a solution for enhancing the quality of thin-film electrolytes.
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Fabrication of Nanopatterned Metal Mold based on Zirconia Nanoparticle and its Application into Thermal Replication of Thermoplastic Materials
Selim Park, Kyoung Chan Min, Sowon Jang, Yujin Ha, Wook-Bae Kim
J. Korean Soc. Precis. Eng. 2022;39(7):501-508.
Published online July 1, 2022
DOI: https://doi.org/10.7736/JKSPE.022.059
Fabrication of a durable and strong nanopatterned mold insert using metal sheet and plate is important for molding of thermoplastic materials. Conventionally, the nickel stamper replicating a master pattern by electroforming process has been used for injection molding of nanotextured products such as Blu-ray media. However, a more facile and cheaper mold fabrication process is highly required for manufacturing of functional products based on nanostructured surface. In this study, zirconia nanoparticles were blended with UV curing polymer to fabricate a polymer nanocompositebased nanopattern mold. Compared to the cured pure Ormostamp, the modulus of elasticity of the nanocomposite filled with approximately 54 vol% of zirconia nanoparticles increased by 160 times. Additionally, the modulus of elasticity reached 197 ㎬ by thermal decomposition of the UV-Cured polymer and post-annealing at 800°C of the nanoparticle layer. The nanopatterns were formed on stainless steel sheet and block, and applied to hot embossing of the PMMA films and injection molding of the COC materials, respectively. No deterioration of the mold occurred during the hot embossing 30 times and the injection molding 600 shots. Nanoparticle-enhanced UV curing nanocomposites or post-heat treatment methods are cost-efficient and easy, because many molds can be manufactured from one master pattern.
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Cathodic Functional Layer via Sputtering and Atomic Layer Deposition for Thin-Film Solid Oxide Fuel Cells
Jaeyoon Lee, Sanghyeok Lee, Hyeontaek Kim, Yongchan Park, Geunjin Lee, Changheon Lee, Sunggyu Choi, Soonwook Hong
J. Korean Soc. Precis. Eng. 2022;39(2):97-102.
Published online February 1, 2022
DOI: https://doi.org/10.7736/JKSPE.021.123
In this study, Yttria-stabilized zirconia (YSZ) functional layers were applied with different thin-film fabrication process such as sputtering and atomic layer deposition (ALD) to enhance oxygen reduction reaction (ORR) for solid oxide fuel cells. We confirmed that the YSZ functional layer deposited with sputtering showed relatively low grain boundary density, while the YSZ functional layer deposited with the ALD technique clearly indicated high grain boundary density through scanning electron microscopy (SEM) and X-ray diffractometry (XRD) results. The YSZ functional layer coated with the ALD technique revealed that more ORR kinetics can occur using high grain boundary density than the functional layer deposited with sputtering. The peak power density of the SOFC deposited with ALD YSZ indicates 2-folds enhancement than the pristine SOFC.
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The Properties of ZrO2 Film Deposition by ALD at Low Temperature
Byung Chan Yang, Jeong Woo Shin, Hyuk-Dong Kwon, Jihwan An
J. Korean Soc. Precis. Eng. 2017;34(10):735-738.
Published online October 1, 2017
DOI: https://doi.org/10.7736/KSPE.2017.34.10.735
ZrO2 film is widely used for high-k applications and also has good mechanical properties. This paper covers the study of the properties of ZrO2 film deposited by atomic layer deposition (ALD) using TEMA Zr and water in the temperature range of 110 to 250oC for potential application in flexible-device fabrication. At a low deposition temperature, ALD ZrO2 films showed a uniform growth rate of ~1 Å per cycle, good uniformity, partial crystallinity, and smooth surface. ZrO2 can also be deposited on the trench structure with a high aspect ratio (~1:50), but conformality needs to be improved for practical applications.

Citations

Citations to this article as recorded by  Crossref logo
  • Suppression of Interfacial Side Reactions and Performance Enhancement of NCA Cathodes via LNO Deposition Using Particle ALD
    Min-ji Kim, In-suk Song, Hyo-jun Ahn, Sun-min Kim, Young-Beom Kim
    Journal of the Korean Society for Precision Engineering.2025; 42(10): 851.     CrossRef
  • Methodology for Plasma Diagnosis and Accurate Virtual Measurement Modeling Using Optical Emission Spectroscopy
    Dongyoun Kim, Seunggyu Na, Hyungjun Kim, Ilgu Yun
    IEEE Sensors Journal.2023; 23(8): 8867.     CrossRef
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