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"친환경 제조 공정"

Article
Laser-induced Process for Fabrication of Silicon Microstructure
Sung Jin Park, Bongchul Kang
J. Korean Soc. Precis. Eng. 2025;42(7):499-503.
Published online July 1, 2025
DOI: https://doi.org/10.7736/JKSPE.025.053
Silicon is a key material in advanced technologies due to its thermal stability, appropriate bandgap, and wide applicability for advanced devices. Si microstructures offer enhanced surface area, thus improving performances for energy storage and biosensing applications. However, conventional top-down fabrication methods are complex, costly, and environmentally unfriendly as they rely on cleanroom facilities and toxic chemicals. This study proposed a simplified, eco-friendly bottom-up laser-based process to fabricate silicon microstructures. By controlling laser parameters during the interaction with silicon nanoparticles, diverse Si structures can be fabricated by Si nanoparticle coating and laser irradiation.
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