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레�저 유� 공정� �용한 실리콘 미세구조 제조

Laser-induced Process for Fabrication of Silicon Microstructure

Journal of the Korean Society for Precision Engineering 2025;42(7):499-503.
Published online: July 1, 2025

1 국민대학� 기계공학부

1 School of Mechanical Engineering, Kookmin University ÿØÿàJFIFddÿìDuckydÿáqhttp://ns.adobe.com/xap/1.0/ ÿîAdobedÀÿÛ„ÿÀŠÿÄ     ! 1AQa"q� 2#w8ð‘¡ÁÑB3´µ6v¶7×X±Rr²$˜9áñb’C³Ãt%u&–ÖW·‚s'(xy¢ÂÓ4T”5f‡—ÇH¨¸Ø  !1AQaq"�‘¡2B ±ÁRbr#³´u67ðѲ3sTt5v8áñâSc$4Ä‚’¢C“ÔÔ%UÕÂÒÓ…•FVÅÿÚ ?ßàêÓ_A÷ú‹× ­j- ŠHÌûû>‚>Ì,šm*>½ôßÈÞfzp"áõö—£Téõ‹£—Ær÷Kkr¾ÒÙî��âœ^× »Òr.|_&€ã]¿|*œ™v¿P¶²uܶv”o‡±¿QÇ1Ÿ ¾�ŒŸmÍëw¾VJUöhu-ãIð"=L‹‡n§õ‘iù½AÆ•8Úö�"ûÛ²½þ„� ák�*Ò¿[yùu:ý.Ž‚v«U¤ÒÚQ+•)Ñá%F� D•Hy²V‡è×B훩kš>‘Hêy8øÓj©Ý¹ q~§9Dúñ4íKR‚þm±zõÚíQ„¥ßö)µ^Ê”Ó.J%k_tVi5NTê¥Ójg!'¡k©Çy|5as…¨ðÃOÏÁÈ»)R–¯Û¸ß©FMÔ¿3LÕ4çj¹6dÖùÚœ#êNIwUF©•]J ûq¡BŒô¹/(ËF™aãŠâfJöRzq3à\GÕ›™ ?ö~\£ 6å)6èý•Wµµ4¶m[O›ö^L0ìEË&r¤RMïØ¶*º×ÑC .ÍÂ]Un·l¥Š-1— 1ßr#Rj/¥´ø¯&QɈ׉˩·ás6­Rj=5Tgæ.´êy™.·PÓ¡:ÖJJíS«…÷:îßC8èÝ-Äù„2u]–d�&¢é»Òvøª·Uºz;¾»7p·9‘˜» 5Všã‰nLÖ¢µ£”¢"y)Ц">Ói×™Ñ(ûIDDd|œ¹Ö Yj0·­; L›§ãR¯fÙÞàÝS�˜:k¥ÚÃñtYäK%*ÒN2^ômñ|&dÄŸthó":‡ãÊe§Øy¾)u§P—¶ôQó¡ZöðW)gcC3Pv&“M¾ÇéM¯„ÂWìÏì¬d&¯Å´ãÛ²½�mvŸT¹èRoÞÕªM0Ü3ä*…F3Yº›dûèæãýÃ6¡®èÚ\8õ,¼\h÷Ý» kß”‘õâi¶¡<k× žÞNTõð¦wSëÔªº­Ñmljö•’j[>->±p£tU©Ôâ�%¯'§L‹R>&EÇBïôH$ßÝý�§ÉMQAU¶x[›$Z6’ÒÍv®Ôi&’_“a.K˜IQ{äh©yÆ’½ ’j"JùOCá ê×9òö—ìeäFŒªÒ�´ÞÿfŽjµîí;™ËšÎ©<[3”_m%ÃïÑ÷ ·•l‹¦Q@¥Ö4œ³Ñg²ü�=5$°™(J]YëÁ®c-OMqé<÷ÊÚõÇ�‡“ wSø²�¨¹z’œ«ïÚ—)kš$ÜË7ªV©I¥ïÅPý붾ͯnV+卵*t]i‚ÐŽD¥31ñí~S¨Añí1ûéÃCÐ2u)ÑÂʼnΛãQn-UÅoîi÷3ò´�:®«gß»rI8ý¯ÊØ“Wm*G zà«Ü•)ZÌ×§J}Åê§Yµ Y“lGeJ6ØcB2I ‹NS3×Qµ>kÔõÞ=KT›½ÅBëœâ—ÆÙÎT]ŠŽž‚W鿇¢ÂÞ6œ¬«Ü+ãSÓÛ¦ööï÷Ož—X©QgG©R¦? 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#E-mail: bckang@kookmin.ac.kr, TEL: +82-2-910-4683
• Received: April 6, 2025   • Revised: May 29, 2025   • Accepted: May 30, 2025

Copyright â“’ The Korean Society for Precision Engineering

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실리콘� 지구 지��서 산소 다�으로 �부한 �소로 1.1 eV� 해당하는 밴드갭 �너지로 �해 불순물 �핑� 통한 N형 � P형 반�체 형성� 가능하며 높� 리튬 저장 용량으로 �해 차세대 �극재로 주목받는 등 첨단 분야� 중요한 소재 중 하나�다[1].
실리콘� �러한 첨단 디바�스� 벌�(Bulk) 형태보다는 미세구조 형태로 존재하며[2], 표면�� 비약�으로 �가시켜 화학 반� 효율 � �너지 변환 효율� 향�시키게 �다[3-6]. 미세구조 형태� 실리콘� 제조하기 위해서 벌� 실리콘� 선��으로 제거하여 미세 구조화하는 하향� 공정(Top-down Process)� 주를 �루고 있으며, 그 중심�는 반�체 공정� �리하고 있다. 반�체 공정� 주로 코팅, �착, 노광, ��과 같� 다단계� 복잡한 과정으로 �루어져 있고, � 공정들� 매우 높� 수준� 진공�와 청정�를 요구하여 �당한 �너지와 막대한 규모� 설비 구성 비용� 요구�다[7,8]. �한, 공정 중 유�한 화학물질� 대량 사용�며 최종 결과물� 완성시키는 � 수십~수백 번� 반복공정� 필요하다[9,10]. 기존 반�체 공정� 문제�� 해결하기 위해 학계�는 나노임프린팅, �가 조립, 레�저 보조 �� 등 다양한 대체 공정들� 보고�고 있으나, 반�체 공정� 완전히 탈피하지 못하고 있다[11-14]. 따�서 기존 하향� 공정�서 벗어나 디바�스 제조� 요구�는 특성� 충족시킬 수 있는 다양한 실리콘 미세구조를 친환경��며 대기�태�서 비�� 간단한 공정으로 제조할 수 있는 새로운 �향� 공정(Bottom-up Process) 기반� 기술 개발� 필요하다.
�를 위해서 본 연구�서는 효율��고 친환경�으로 대기�태�서 복잡한 실리콘 미세구조를 제조하는 방법으로 레�저와 실리콘 나노입�를 기반으로 실리콘 미세구조� �향� 제조 공정� 제안한다. 레�저 공정� 마스� 없� �하는 위치� 미세하게 �너지를 집중할 수 있어 공정 유연성과 정밀�가 우수하며, 비접촉·비가열 방�으로 열� ��� �고 다양한 기�� �용 가능하다. �한, 국소 조사만으로 고�·고해�� 가공� 가능하여 공정 시간 단축과 �너지 효율 향�� 유리하다. 제안� 공정� 실리콘 나노입�와 레�저 간� 물리� �호작용� 기반으로 하며 나노입�� 간단히 레�저를 조사하는 것만으로 다소 복잡한 미세구조를 제작할 수 있는 특징� 있다. 반�체 공정�서 요구하는 유해 화학물질(불산, 트리�로로�틸렌 등)과 높� 수준� 청결�(ISO Class 5 ��) � 고진공(10-5 kPa �하)� 불필요하고 공정 단계를 최소화함으로�, �온·�압� 대기 환경�서 수행� 수 있다. 실리콘 나노입�와 분산용 용매만� 사용하므로 공정 전반� 유해성� 낮� �만 아니�, 나노입�� 코팅, 레�저 조사 공정만으로 미세구조 형성� 가능하다는 ��서 �� 공정단계�서 기�하는 �� 공정 시간과 �너지 효율 측면�서� 높� ��� 갖는다. 그럼�� 불구하고 레�저 조사 조건� 조절함으로� 간편하게 다양한 형태와 �기� 미세구조를 구현할 수 있다[19].
Table 1

Comparison between bottom-up and top-down fabrication methods

Table 1
Categories Bottom-up methods Top-down methods
Process environment [15] Ambient temperature and pressure High temperature, high vacuum, cleanroom required
Chemical usage [16] Low-toxicity chemicals Hazardous chemicals
Process complexity [17] Simplified steps, potential for one-step process Multiple steps (lithography, etching, cleaning)
Environmental impact [16] Minimal waste, eco-friendly solvents Significant chemical waste and energy consumption
Cost efficiency [18] Low-cost equipment and materials Expensive tools and materials
Fig. 1과 같� 본 공정� 코팅과 레�저 조사 과정� 반복하여 �루어진다. 20 µm �께� 구리 호� 위� Butanol� 분산� 20 wt%� 실리콘 나노입� 용액� 스핀코팅하였다. 본 공정�는 실리콘� 넓� �수 스펙트럼� �함�며 레�저 공정 중 나노입�� 소결과 파쇄� � 가지 물리� 현�� 유�하기 위한 1070 nm 파장� Ytterbium Pulsed Fiber 레�저가 사용�었고, 2D Galvanometer 스�너와 F-theta 렌즈를 �용하여 �하는 경로로 레�저 초�� ��하며 레�저 공정� 진행하였다. 레�저 출력 � 펄스간 간격� 조절하여 다양한 형태� 실리콘 미세구조를 제조하였다. 제작� 미세구조 형�� 전계 방출형 주사전�현미경� 활용하여 분�하였다.
Fig. 1

Schematics of experiment steps. (a) Experimental setup and (b) Process procedures

KSPE_2025_v42n7_499_f001.jpg
Fig. 2

Photothermal interaction between pulsed laser and Si NPs

KSPE_2025_v42n7_499_f002.jpg
3.1 레�저-실리콘 나노입� 간 물리� �호작용
본 연구�서는 펄스레�저와 실리콘 나노입� 간� 물리� �호작용� �용하여 다양한 디바�스 제작� �용� 수 있는 형� � 형태 가변형 미세구조를 제조하였다. 실리콘 나노입�� 레�저 펄스� 충격파와 열�너지로 �하여 나노입�� 파쇄와 소결� 반�� �시� 발�하여 미세구조화가 진행�다[15,20-22]. �러한 �가지 �호작용� 레�저 펄스간 간격� 조절함으로� 제어가 가능하다[23]. 펄스간 간격� 짧� 경우�는 광 �너지� �해 전달�는 열 발� � �집현� 보다는 레�저 펄스� �한 충격파가 � 지배�으로 작용하여 실리콘 나노입�� 파쇄작용� 강화�고 �로 �해서 미세구조 �부� 파쇄� 나노구조가 형성�다. 반면, 펄스 간 간격� 긴 경우 파쇄보다 열� �한 용융 � �집 현�� 활발히 �어나 나노입�들� 소결�어 마��로 �기� �기 구조가 형성�다. �러한 � 가지 구조형성 메커니즘� 기반으로 하여 다양한 형태� 미세구조 제조를 설계하였다. �러한 펄스 레�저 공정 조건 기반 물리� 현� 조절과는 달리 연�파(Continous Wave, CW) 레�저를 사용한 경우�는 �대�으로 낮� 첨� 출력으로 �하여 구조 형성보다는 전반�� 과소결� �어나며 �탄화� 표면� 형성�어 높� 표면�� 가지는 기능성 소�� �합한 구조 형성� 부�절하였다.
Fig. 3

Silicon structure types based on process parameters

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3.2 다종 실리콘 미세구조 제조
기�과 미세구조 간� 물리� 결합력� 향�시키고, 순차� 반복공정으로 형성�는 미세구조 간� 접합 강�를 극대화하기 위해, 본 연구�서는 미세한 �기 형태� 기반구조를 선정하였다. 해당 기반구조는 기�과� 밀착 면�� �가시키고, 나노입� 기반 후� 구조체와� 계면 결합력� 향�시키는 � 유리하다. �러한 기반구조 위� 실리콘 나노입�를 코팅하고 레�저를 조사하는 과정� 반복 수행하여 보다 복잡한 미세구조를 제작하였다.
레�저� 펄스 간 간격과 출력� 공정 결과� 결정�� �향� 미쳤으며 �� 따� 다양한 미세구조가 형성�었다. 우선 펄스 간 간격� 길고 레�저 출력� 높� 조건�서는 국부�으로 높� 온�가 발�하고, �로 �해 실리콘 나노입� 간� 열�집 반�� �대�으로 활발하게 �어났다. 나노입�들� 열�으로 소결�며 �차�으로 입� �기가 �가하고, 결국 구조체 전체� 체�� 커져 �균 지름 2.24 µm� 실리콘 �기가 형성�는 결과를 얻었다. 반면, ��한 펄스 간격�서 레�저 출력� 낮� 경우�는 초기 단계�서는 입� 간 소결� 반�� �활히 �어나지만 낮� 출력으로 �해 입� �기가 충분히 성장할 수 있는 온�� �달하지 못한다[14]. 그 결과, �균 지름 770 nm� �기 �기�서 소결� 정지�고 초기 �기형�� 기반구조 위� � 하나� �기 형태가 추가로 형성�는 �중 �기 구조가 �성�다. �는 미세 구조� 수�� 계층화가 가능함� 실험�으로 보여주는 결과�다. 한편, 펄스 간 간격� 짧고 레�저 출력 �한 낮� 조건�서는 반복��고 국소�� 저강� 조사로 �해 표면� 고밀� �너지가 누��면서 입� 간 소결보다는 기존 200 nm였� 실리콘 입�가 �균 50 µm 입�로� 파쇄 후 재�착� 통해 미세한 �기들� 서로 다층�으로 집��며 나노구조가 발달� 계층� 구조가 형성�다. �러한 구조는 높� 표면�과 다공성� 갖춰 센서 � 광�수층 등 다양한 기능성 �용� 유리한 특성� 제공할 것으로 기대�다. 마지막으로 펄스 간 간격� 짧고 레�저 출력� 높� 조건�서는 과�한 광/열 �너지가 짧� 시간 내� 기�� 전달�며 대부분� 실리콘 나노입�� ��� �어났� �만 아니� 높� 열로 �한 기�� 표면 ��� 발�하였다.
Table 2

Process parameters for each structure

Table 2
Structure types Laser power [W] Feed per pulse [μm]
Bump structure 8 5
Double bump structure 4 5
Hierarchical structure 4 1
Substrate damage 8 1
Fig. 4

SEM images of four types of microstructures. (a) Bump structure, (b) Double bump structure, (c) Hierarchical structure, and (d) Removal of silicon NPs

KSPE_2025_v42n7_499_f004.jpg
본 연구�서는 레�저와 나노입�를 활용한 미세구조� �향� 제조 공정�서 레�저 조사 조건� 제어를 통해서 다양한 형태� 미세구조를 형성할 수 있�� 실험�으로 확�하였다. 펄스간격과 출력��는 � 가지 공정 변수를 조절함으로� (1) 소결 중심� 체� 확장형 구조, (2) 성장 조절� 따른 �중 �기 구조, (3) 표면�� 극대화� 계층� 나노구조를 구현할 수 있었다. �는 별�� 마스�, ��, 혹� 리소그래피 공정과 같� 반�체 공정 없� 대기�태�서 간단한 공정으로 다양한 미세구조 제작� 가능함� 보여주었다. 결론�으로 본 연구는 레�저 조사 조건 제어만으로 다양한 구조� 기능� 설계할 수 있는 새로운 접근법� 제시하였으며 첨단 기능성 소�� 구조 설계 � 대면� 제조� 활용�가 매우 높� 것으로 기대�다. 향후�는 본 공정� 기반으로 제작� 미세구조� 결정성, 비표면�, 산화비율 등 추가�� 구조 특성� 측정하고 실제 기능성 소�� 제작 � 구현하여 �용가능성� 실험�으로 규명할 예정�다. �러한 후� 연구는 본 공정� 실용화 가능성과 산업� �용 범위를 �욱 넓히는 � 기여할 것으로 �단�다.
본 연구는 한국연구재단� 기초연구실지�사업(No. RS-2023-00217661, 광유� 계면 제어를 통한 제로 �너지 얼� 프리 스킨 제조), 중견연구�지�사업(No. RS-2023-NR076648, 광 유� 초고� 다중 물리/화학 �너지 �터렉션 기반 친환경 디바�스 구현)와 산업통���부�(No. RS-2024-00446120, 레�저 소결 패터� 기반 차세대 LED 디스플레� 무베젤 배선 제조 � 리페어 통합 패키징 시스템 개발)� 지�� 받아 수행�었�.
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Sung Jin Park
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Master’s degree graduate in the department of mechanical gngineering, Kookmin university. His research interest is laser process.
Bongchul Kang
KSPE_2025_v42n7_499_bf002.jpg
Associate professor in the school of mechanical engineering, Kookmin university. He received Ph.D. at Korea Advanced Institute of Science and Technology (KAIST). His research interest is laser manufacturing and precision engineering.

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Laser-induced Process for Fabrication of Silicon Microstructure
J. Korean Soc. Precis. Eng.. 2025;42(7):499-503.   Published online July 1, 2025
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J. Korean Soc. Precis. Eng.. 2025;42(7):499-503.   Published online July 1, 2025
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Laser-induced Process for Fabrication of Silicon Microstructure
Image Image Image Image
Fig. 1 Schematics of experiment steps. (a) Experimental setup and (b) Process procedures
Fig. 2 Photothermal interaction between pulsed laser and Si NPs
Fig. 3 Silicon structure types based on process parameters
Fig. 4 SEM images of four types of microstructures. (a) Bump structure, (b) Double bump structure, (c) Hierarchical structure, and (d) Removal of silicon NPs
Laser-induced Process for Fabrication of Silicon Microstructure
Categories Bottom-up methods Top-down methods
Process environment [15] Ambient temperature and pressure High temperature, high vacuum, cleanroom required
Chemical usage [16] Low-toxicity chemicals Hazardous chemicals
Process complexity [17] Simplified steps, potential for one-step process Multiple steps (lithography, etching, cleaning)
Environmental impact [16] Minimal waste, eco-friendly solvents Significant chemical waste and energy consumption
Cost efficiency [18] Low-cost equipment and materials Expensive tools and materials
Structure types Laser power [W] Feed per pulse [μm]
Bump structure 8 5
Double bump structure 4 5
Hierarchical structure 4 1
Substrate damage 8 1
Table 1 Comparison between bottom-up and top-down fabrication methods
Table 2 Process parameters for each structure