In order to monitor the machining status of a machine tool, it is necessary to measure the signal of the machine tool and establish the relationship between the machining status and the signal. One effective approach is to utilize an AIbased analysis model. To improve the accuracy and reliability of AI models, it is crucial to identify the features of the model through signal analysis. However, when dealing with time series data, it has been challenging to identify these features. Therefore, instead of directly applying time series data, a method was used to extract the best features by processing the data using techniques such as RMS and FFT. Recently, there have been numerous reported cases of designing AI models with high accuracy and reliability by directly applying time series data to find the best features, particularly in the case of AI models combining CNN and LSTM. In this paper, time series data obtained through a gap sensor are directly applied to an AI model that combines CNN, LSTM, and MLP (Multi-Layer Perceptron) to determine tool wear. The machine tool and tool status were monitored and evaluated through an AI model trained using time series data from the machining process.

Factors such as weight reduction and improved fuel efficiency of vehicles interfere with the efficiency of roller bearings in automobiles under harsh conditions. In particular, studies are ongoing to increase the load capacity and rigidity under highspeed conditions. The development of tapered roller bearings that can be used under high-speed conditions is accelerating. In the case of high-speed bearings, factors such as centrifugal force, gyroscopic moment, and slippage have a greater influence on the performance of the bearing, unlike the traditional operating mechanisms. The resulting lubrication characteristics have a profound impact on the failure mode of the bearing. In particular, unlike traditional roller bearings, system failure due to damage to the retainer frequently occurs, suggesting the need for prompt investigation. In this study, the rotational characteristics and strength of three models, a steel cage and two plastic cages for tapered roller bearings with the same internal structure, were examined. A comparative analysis of retainers with different shapes and materials can reveal the factors contributing to optimal performance under high-speed operating conditions and the optimal design of bearings.

Ball and roller bearings are commonly used machine elements for supporting rotating motion about shafts in simple devices including bicycles, in-line skates, and electric motors, as well as in complex machines. Heat is generated by the friction in the bearings, which causes the temperature inside the bearing to increase. If the heat is not appropriately removed from the bearing, elevated temperatures may give rise to premature failure. It is, therefore, important to be able to calculate the temperature in the bearings due to friction. Here, we describe a method to estimate the frictional torque in bearings using an empirical formula developed using a method based on bearing analysis tool and the measured frictional torque in a spindle system. Thermal analysis of the spindle system including the bearings was achieved using the finite element method (FEM), and the bearing temperature was compared with measured data to verify the empirical formula.

Fast tool servo (FTS) is an enabling technology to fabricate various shapes of functional surface geometries in a precise and controllable manner. FTS can be also employed as a straightforward and efficient surface treatment way of making such products more durable. In this work, process characteristics using high-precision FTS-based surface texturing were qualitatively and quantitatively investigated to provide a class of surface design rule. The morphologies of surfaces processed with different conditions were first examined by observing the resultant 2D/3D surface profiles. In addition, the effects of the surface treatment using FTS on hardness and wear properties were characterized and compared to those without treatment.

Recently, surface texturing technologies have been widely used in lots of industries to increase the machinery efficiency. In this research, the lubrication characteristics of a crank shaft pin turner bearing with dimples were studied. When increasing the dimples, the load carrying capacity due to the increased pressure was increased because those have sealing effects. Also, the run-out error of the bearing was decreased. Therefore, it is important to consider the depth, the number and the distribution of dimples when designing the hydrostatic journal bearing.

A multi-tasking machine tool for large scale marine engine crankshafts has been developed together with design technologies for its special devices. Since work pieces, that is, crankshafts to be machined are big and heavy; weight of over 100 tons, length of 10 m long, and diameter of over 3.5 m, several special purpose core devices are necessarily developed such as PTD (Pin Turning Device) for machining eccentric pin parts, face place and steady rest for chucking and resting heavy work pieces. PTD is a unique special purpose device of open-and-close ring typed structure equipped with revolving ring spindle for machining eccentric pins apart from journal. In order to achieve high rigidity of the machine tool, structural design optimization using TMSA (Taguch Method based Sequential Algorithm) has been completed with FEM structural analysis, and a hydrostatic bearing system for the PTD has been developed with theoretical hydrostatic analysis.

LCD(Liquid Crystal Display) is widely used electronic product. It needs too many processes such as PECVD(Plasma Enhanced Vapor Deposition), Sputtering, Photo-lithography, Dry etch. Each process is important but inspection process is more important because most companies emphasis on the six sigma. Recently, LCD inspection system is composed with inlet, inspector, outlet air pads. LCD is inspected on air pad which is shooting air from air hole. This paper studies on pad design of air. bearing for LCD inspection to minimize LCD fluctuation. This design is able to reduce fluctuation and then satisfies CCD inspectional range. Also inspection pad needs to adequate stable area.

Nano-scale fabrication of silicon substrate based on the use of atomic force microscopy (AFM) was demonstrated. A specially designed cantilever with diamond tip, allowing the formation of damaged layer on silicon substrate by a simple scratching process, has been applied instead of conventional silicon cantilever for scanning. A thin mask layer forms in the substrate at the diamond tip-sample junction along scanning path of the tip. The mask layer withstands against wet chemical etching in aqueous KOH solution. Diamond tip acts as a patterning tool like mask film for lithography process. Hence these sequential processes, called tribo-nanolithography, TNL, can fabricate 2D or 3D micro structures in nanometer range. This study demonstrates the novel fabrication processes of the micro cantilever and diamond tip as a tool for TNL using micro-patterning, wet chemical etching and CVD. The developed TNL tools show outstanding machinability against single crystal silicon wafer. Hence, they are expected to have a possibility for industrial applications as a micro-to-nano machining tool.

Measurement of five DOF motion errors in a ultra precision feed table was attempted in this study. Yaw and pitch error were measured by using a laser interferometer and roll error was measured by using the reversal method. Linear motion errors in the vertical and horizontal directions were measured by using the sequential two point method. In this case, influence of angular motion errors was compensated by using the previously measured ones by the laser interferometer and the reversal method. The capacitive type sensors and an optical straight edge were used in the reversal method and the sequential two point method. Influence of thermal deformation on sensor jig was investgated and minimized by the periodic measurement according to the variation of room temperature. Deviation of gain between sensors was also compensated using the step response data. 5 DOF motion errors of a hydrostatic table driven by the linear motor werer tested using the measurement method. In the horizontal direction, measuring accuracies for the linear and angular motion were within ±0.02㎛ and ±0.04 arcsec, respectively. In the vertical direction, they were within ±0.02㎛ and ±0.05 arcsec. From these results, it was found that the introduced measurement method was very effective to measure 5 DOF motion errors of the ultra precision feed tables.

Nanoscale fabrication of silicon substrate in an aqueous solution based on the use of atomic force microscopy was demonstrated. A specially designed cantilever with diamond tip, allowing the formation of damaged layer on silicon substrate easily by a simple scratching process (Tribo-Nanolithography, TNL), has been applied instead of conventional silicon cantilever for scanning. A slant nanostructure can be fabricated by a process in which a thin damaged layer rapidly forms in the substrate at the diamond tip-sample junction along scanning path of the tip and simultaneously the area uncovered with the damaged layer is being etched. This study demonstrates how the TNL parameters can affect the formation of damaged layer and the shape of 3-D structure, hence introducing a new process of AFM-based nanolithography in aqueous solution.

In order to discuss the availability of hydrostatic guideways driven by the core less linear motor to ultra precision machine tools, a prototype of guideway is designed and tested in this research. A coreless linear DC motor with the continuous force of 156 N and a laser scale with the resulution of 0.01 ㎛ are used as the feeding system. The experiments are performed on the static stiffness, motion accuracy, positioning accuracy, micro step response and variation of velocity. The guideway has the infinite axial stiffness within 50 N of applied load, and by the motion error compensation method using the Active Controlled Capillary, 0.08 ㎛ of linear motion error and 0.1 arcsec of angular motion error are acquired. The guideway also has 0.21 ㎛ of positioning error and 0.09 ㎛ of repeatability, and it shows the stable response against the 0.01 ㎛ resolution step command. The velocity variation of feeding system is less than 0.6%. From these results, it is confirmed that the hydrostatic guideway driven by the coreless linear motor is very useful for the ultra precision machine tools.