The practical application of Raman spectroscopy is often constrained by its low signal sensitivity, particularly for low-concentration liquid samples. This study introduces a straightforward platform that enhances Raman signals by physically concentrating analytes, providing an alternative to complex substrate fabrication and chemical treatments. We employed a femtosecond pulse laser to create functional micro-grid patterns on a silicon (Si) substrate. This laser process induces localized ablation and simultaneous oxidation, resulting in three-dimensional, hydrophilic microstructures of nonstoichiometric silicon oxide (SiO_2-x). These grid structures effectively confine aqueous sample droplets through a pinning effect, functioning as a microwell array that traps and concentrates suspended polystyrene (PS) particles. This physical concentration mechanism achieved a notable signal enhancement, with a maximum factor of 5.2 for PS particles, without the need for sample dehydration. This work presents a simple, cost-effective, and highly reproducible alternative to conventional SERS for analyzing low-concentration liquid samples, demonstrating strong potential for integration into microfluidic systems.

Silicon is a key material in advanced technologies due to its thermal stability, appropriate bandgap, and wide applicability for advanced devices. Si microstructures offer enhanced surface area, thus improving performances for energy storage and biosensing applications. However, conventional top-down fabrication methods are complex, costly, and environmentally unfriendly as they rely on cleanroom facilities and toxic chemicals. This study proposed a simplified, eco-friendly bottom-up laser-based process to fabricate silicon microstructures. By controlling laser parameters during the interaction with silicon nanoparticles, diverse Si structures can be fabricated by Si nanoparticle coating and laser irradiation.