Journal of the Korean Society for Precision Engineering

Design and Performance Test of Fast Steering Mirror: Byoung Ju Lee, Yong Hoon Lee, Hyeong Rae Kim, Ye Eun Bae, Sang Uk Nam, Jae Woo Jung, Sang Won Jung, Young Jin Park, Jun Young Yoon, No Cheol Park, Seoung Han Lee; J. Korean Soc. Precis. Eng. 2025;42(11):927-936.
Published online November 1, 2025; DOI: https://doi.org/10.7736/JKSPE.025.070

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Currently, advanced countries such as the US and the UK are researching laser-based weapons and communication systems. The application of Fast Steering Mirror (FSM) is crucial in laser systems to control internal optical paths and compensate for disturbances, including atmospheric fluctuations and mechanical vibrations. Additionally, research is underway to enhance image clarity in surveillance and reconnaissance systems, such as Electro-Optical/Infrared (EO/IR) systems, by applying FSM technology. Consequently, the demand for FSMs is rising, necessitating the development of small, lightweight, and high-performance solutions. In this study, we designed a compact and lightweight FSM with a diameter of 25 mm, and its performance was validated through rigorous testing. Furthermore, we developed a piezoelectric actuator using single crystal piezoelectric material to ensure a wide operating bandwidth and rapid response speed for the FSM. Before manufacturing the designed FSM, we conducted modeling and simulation (M&S) to analyze its performance and confirm that it met the required specifications. Subsequently, a prototype of the FSM was produced, and its operating range, bandwidth, and accuracy were evaluated through performance tests.

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Study on Hysteretic Characteristics of Piezoelectric Fast Steering Mirror in Frequency Response: Sang Won Jung, Hyo Geon Lee, Jae Woo Jung, Jae Hyun Kim, Seonbin Lim, Youngjin Park, Onemook Kim, Jaehyun Lim, Kijun Seong, Daehee Lee, Minjae Ko, No-Cheol Park, Jun Young Yoon; J. Korean Soc. Precis. Eng. 2024;41(11):913-920.
Published online November 1, 2024; DOI: https://doi.org/10.7736/JKSPE.024.116

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Nonlinear hysteresis effects in piezoelectric fast steering mirrors (FSMs) are major culprits of deteriorating the servo performance and reducing the robustness of a control system. In order to compensate for such nonlinearities, this paper presents an identification and compensation method of piezoelectric hysteresis using frequency response measurements. The relationship between hysteresis curves and frequency response was analyzed using various amplitudes of input voltage and measured output displacements. Results proved that hysteresis curves could be reconstructed based on frequency response measurements. By utilizing an inverse function from reconstructed hysteresis curves, parameters for the compensation model were identified. Experimental results showed that the maximum range of output displacement at the nominal position due to hysteresis was significantly decreased by 76% when the hysteresis model identified by the proposed frequency-domain method was used. In addition, the compensated frequency response showed consistent results regardless of input amplitudes, implying that linear dynamics of the piezoelectric FSM could be separately measured.

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Dynamic Model of Fast Steering Mirror based on Piezoelectric Actuator: Yongsu Park, Geemin Lee, Dae Gyu Choi; J. Korean Soc. Precis. Eng. 2024;41(8):647-651.
Published online August 1, 2024; DOI: https://doi.org/10.7736/JKSPE.024.050

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The fast steering mirror is now being used in industries beyond precision processing, such as space and defense. The piezoelectric fast steering mirror (PFSM), which utilizes a piezoelectric actuator, is particularly suitable for these industries as they often require devices like electro-optic devices to withstand external vibrations and impacts. While the PFSM has inherent high stiffness, its complex structure makes it difficult to control. To address this, an accurate dynamic model is necessary. In this paper, we derived a dynamic model for the PFSM using a two-inertial system model that takes into account its structural characteristics. This dynamic model consists of both a mechanical system model and an electrical system model. We measured the frequency response function from electrical input to mechanical output and compared it with the derived frequency response model to verify its accuracy. The derived model can be used not only for control design, but also for instrument design and interpretation.

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Research on Dry Cooling and Processing Precision in Ultra-precision Machining: Gyung-Il Lee; J. Korean Soc. Precis. Eng. 2023;40(11):929-936.
Published online November 1, 2023; DOI: https://doi.org/10.7736/JKSPE.023.112

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Recently, with the development of the space, mobility, semiconductor, and precision machinery industries, the processing of precision mechanical parts has been recognized as an important and a high value-added technology. Research on ultra-precision processing is actively underway to produce such products. In addition, eco-friendliness and 0% carbon are emerging as key keywords in modern industrial society, and the need for this is also increasing in the ultra-precision processing field. As the industry advances, environmental issues are becoming a major concern, and in the processing technology field, environmental destruction caused by cutting oil is becoming an issue. To solve this problem, this study measured the movement precision of the global feed system and instaled a Fine Servo that corrects the nm-level movement of the feed system in real time, using a piezoelectric actuator, to finely drive the cutting tool to control the movement necessary for machining. We intended to control variables for ultra-precision machining and measure cutting heat generation in real time to establish a dry cooling method using thermoelectric elements without using cutting oil.

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Development and Performance Evaluation of a Fine Stage for Compensating 6-DOF Motion Errors of an Ultra-Precision Linear Stage: Hoon-Hee Lee, In-Seok Lee, Kwang-Il Lee, Seung-Han Yang; J. Korean Soc. Precis. Eng. 2021;38(2):123-129.
Published online February 1, 2021; DOI: https://doi.org/10.7736/JKSPE.020.083

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In ultra-precision processes, such as aerospace parts and precision mold machining, the accuracy of a feed drive system should be secured to achieve sufficient form accuracy. Dual-Servo stages, which compensate for multi-DOF motion errors, are being developed depending on the applied processes. This paper deals with the fine stage of a dual-servo stage to compensate for 6-DOF motion errors of a linear stage. The proposed fine stage measured 6-DOF errors of the linear stage motion with capacitive sensors, a reference mirror, and an optical encoder. It compensated for the errors using the flexure hinge mechanism with piezo actuators. The error equations and the inverse kinematics were derived to calculate the 6- DOF errors and displacements of piezo actuators for 6-DOF motions, respectively. Performance evaluation was implemented to verify feasibility of the developed fine stage of the fabricated dual-servo stage. Through the step response test of the fine stage, compensation resolutions for the translational and the rotational motion were confirmed to be less than 10 nm and 1/3 arcsec, respectively. The 6-DOF motion errors in the verification test were reduced by 73% on average.

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Study on Comparison of Friction Force between Ball- and Roller-LM Guides
Hyeon Jeong Ra, Dong Wook Kim, Jun Man Lee, Han Seon Ryu, Jae Han Joung, Young Hun Jeong
Journal of the Korean Society for Precision Engineering.2023; 40(11): 907. CrossRef

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A Study on ECTS Control for Ultra-Precision Machining: Gyung-Il Lee; J. Korean Soc. Precis. Eng. 2020;37(9):699-705.
Published online September 1, 2020; DOI: https://doi.org/10.7736/JKSPE.020.034

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In the framework of the 4th industrial revolution, modern machine-building rapidly converges with IOT technology. This requires very high precision machining of the parts and assemblies, such as electronics, vehicle and components, agricultural and construction machines, optical instruments, and machine tools. However, high precision machinery is quite expensive, and there exists a general need for low-cost equipment. While many researchers are working on this, their major focus is on cutting tools. This study aimed to compensate for errors and enhance machinery precision by adding a servo controller to the processing unit. Consequently, the study is on servo control and processing precision for processing utilizing ECTS (Error Compensation Tool Servo) to compensate for errors.