A compositional library of Ag-Ti thin films was fabricated using combinatorial RF magnetron sputtering. The films exhibited a gradual compositional gradient across the substrate, ranging from Ag-rich to Ti-rich compositions. SEM analysis revealed a uniform thickness of approximately 150 nm for all films. The relationship between composition and properties was investigated, demonstrating that increasing Ag content led to decreased resistivity and increased density. These results can be attributed to the high electrical conductivity and density of Ag. To optimize SAW device performance, a balance between resistivity and density must be achieved. While Ag-rich films offer higher electrical conductivity, they may experience reduced inverse piezoelectric effects due to increased density. Conversely, Ag-poor films may have improved inverse piezoelectric effects but reduced electrical conductivity.

In this study, we successfully demonstrated a fuel cell fabrication method using a platinum-samarium-doped ceria (Pt-SDC) composite cathode, which could reduce the platinum content while maintaining the same thickness as the functional layer. The Pt-SDC composite cathode was deposited by a sputtering process in which two materials were simultaneously deposited by a co-sputtering system. Despite the decreased platinum content in the composite cathode, we achieved high performance of the fuel cell since Pt-SCD was able to form triple-phase boundaries (TPBs) not only at the interface between the cathode and the electrolyte but at the entire volumetric surface of the cathode. This composite cathode revealed that Pt-SDC could enhance the oxygen reduction reaction rate by enlarging the TPB site in the cathode. The fuel cell fabricated in this study with a composite cathode demonstrated improved performance at 1.66 times the peak power density of a pristine fuel cell.

In this study, Yttria-stabilized zirconia (YSZ) functional layers were applied with different thin-film fabrication process such as sputtering and atomic layer deposition (ALD) to enhance oxygen reduction reaction (ORR) for solid oxide fuel cells. We confirmed that the YSZ functional layer deposited with sputtering showed relatively low grain boundary density, while the YSZ functional layer deposited with the ALD technique clearly indicated high grain boundary density through scanning electron microscopy (SEM) and X-ray diffractometry (XRD) results. The YSZ functional layer coated with the ALD technique revealed that more ORR kinetics can occur using high grain boundary density than the functional layer deposited with sputtering. The peak power density of the SOFC deposited with ALD YSZ indicates 2-folds enhancement than the pristine SOFC.

Solid oxide fuel cell is a next generation energy conversion device that can efficiently convert the chemical energy of fuel into electrical energy. Fuel flexibility is one of the advantages of SOFCs over other types of fuel cells. SOFCs can operate with hydrocarbon type fuel. While nickel based composite is commonly used in direct methane fueled SOFC anode because of its great catalytic activity for methane reforming, the direct use of hydrocarbon fuels with pure Ni anode is usually insufficient for facile anode kinetics, and also deactivates the anode activity because of carbon deposition upon prolonged operation. In this report, the Ni based anodes with 20 nm thick catalytic functional layers, i.e., Pt, Ru, and Pt-Ru alloy, are fabricated by using the co-sputtering method to enhance the anode activity and power density of direct-methane SOFC operating at 500℃.