Mechanical Property Measurement in Nano Imprint Process

Jae-Hyun Kim; Hak-Joo Lee; Byung-Ik Choi; Jae-Yoon Kang; Chung-Seog oh

Articles

Page Path

Article

Mechanical Property Measurement in Nano Imprint Process

Jae-Hyun Kim, Hak-Joo Lee, Byung-Ik Choi, Jae-Yoon Kang, Chung-Seog oh

JKSPE 2004;21(6):7-14.

Published online: June 1, 2004

Author Affiliations

2 Views
0 Download
0 Crossref
0 Scopus

prev next

Full Article

Download PDF

Keywords: Nano process(나노 공정),Nano imprint(나노 임프린트),Micro tensile test(미소 인장 시험),Nanoindentation(나노 압입),Atomic Force Microscope(원자 힘 현미경),MEMS(미소기전시스템)

Citations

Citations to this article as recorded by

Cite

CITE

export

Copy Download

Format

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
BibTeX — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

Mechanical Property Measurement in Nano Imprint Process

J. Korean Soc. Precis. Eng.. 2004;21(6):7-14. Published online June 1, 2004

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
bib — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

Mechanical Property Measurement in Nano Imprint Process

J. Korean Soc. Precis. Eng.. 2004;21(6):7-14. Published online June 1, 2004

Articles

Page Path

Mechanical Property Measurement in Nano Imprint Process

Full Article

Citations

CITE

Download Citation

Format:

Include:

ABOUT

BROWSE ARTICLES

EDITORIAL POLICIES

FOR CONTRIBUTORS