The objective of this study is to investigate the influence of process parameters, such as power of laser, cutting speed of laser and material thickness, on the practical cutting region and the kerfwidth for the case of cutting of CSP 1N sheet using high power Nd:YAG laser in continuous wave(CW) mode. In order to obtain the practical cutting region and the relationship between process parameters on the kerfwidth, several laser cutting experiments are carried out. The effective heat input is introduced to consider the influence of power and cutting speed of laser on the kerf width together. From the results of experiments, the allowable cutting region and the relationship between the effective heat input and kerfwidth for the case of cutting of CSP IN sheet using high power CW Nd:YAG laser have been obtained to improve the dimensional accuracy of the cut area.