Nano-machining Technology Using Electron Beam

Jae Gu Kim; Jae Jong Lee; Sung Hak Cho; Doo Sun Choi; Eung Suk Lee

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Nano-machining Technology Using Electron Beam

Jae Gu Kim, Jae Jong Lee, Sung Hak Cho, Doo Sun Choi, Eung Suk Lee

JKSPE 2008;25(3):7-14.

Published online: March 1, 2008

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Keywords: E-beam lithography(전자빔 리소그래피),Nano patterning(나노 패터닝),3D nanomachining(3차원 나노가공),Process parameter(공정 조건)

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Nano-machining Technology Using Electron Beam

J. Korean Soc. Precis. Eng.. 2008;25(3):7-14. Published online March 1, 2008

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Nano-machining Technology Using Electron Beam

J. Korean Soc. Precis. Eng.. 2008;25(3):7-14. Published online March 1, 2008

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