Study on Electron Optic Analysis for Electron-beam Processes

Eung Ki Lee

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Study on Electron Optic Analysis for Electron-beam Processes

Eung Ki Lee

JKSPE 2008;25(3):15-22.

Published online: March 1, 2008

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Keywords: E-beam lithography(전자빔 묘화),Electron optics(전자 광학),Magnetic lens(자계 렌즈),Magnetic field(자계),pole(자극)

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Study on Electron Optic Analysis for Electron-beam Processes

J. Korean Soc. Precis. Eng.. 2008;25(3):15-22. Published online March 1, 2008

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Study on Electron Optic Analysis for Electron-beam Processes

J. Korean Soc. Precis. Eng.. 2008;25(3):15-22. Published online March 1, 2008

A Study on Numerical Analysis for Determination of Glass Molding Process Conditions for Glass Lenses

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