FIB-Sputtering Process Technology and Its Application

Eun Goo Kang; Byoung Ryul Choi; Won Pyo Hong; Seok Woo Lee; Hon Zong Choi

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FIB-Sputtering Process Technology and Its Application

Eun Goo Kang, Byoung Ryul Choi, Won Pyo Hong, Seok Woo Lee, Hon Zong Choi

JKSPE 2008;25(3):23-31.

Published online: March 1, 2008

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Keywords: FIB-Sputtering(접속이온빔 식각),FIB-CVD(접속이온빔 증착),Micro/Nano mold(마이크로/나노금형),FIB Processing Technology(FIB가공공정기술),FIB Application(FIB 응용기술)

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FIB-Sputtering Process Technology and Its Application

J. Korean Soc. Precis. Eng.. 2008;25(3):23-31. Published online March 1, 2008

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FIB-Sputtering Process Technology and Its Application

J. Korean Soc. Precis. Eng.. 2008;25(3):23-31. Published online March 1, 2008

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FIB-Sputtering Process Technology and Its Application

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