Simulation of Focused Ion Beam Processes for Micro-Nano Machining

Hiwon Lee; Jin Han; Byung-Kwon Min; Sang Jo Lee

Articles

Page Path

Article

Simulation of Focused Ion Beam Processes for Micro-Nano Machining

Hiwon Lee, Jin Han, Byung-Kwon Min, Sang Jo Lee

JKSPE 2008;25(3):44-49.

Published online: March 1, 2008

Author Affiliations

2 Views
0 Download
0 Crossref
0 Scopus

prev next

Full Article

Download PDF

Keywords: Focused Ion Beam processing(집속이온빔 가공),Geometrical accuracy(형상정밀도),Simulation Method(시뮬레이션 방법)

Citations

Citations to this article as recorded by

Cite

CITE

export

Copy Download

Format

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
BibTeX — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

Simulation of Focused Ion Beam Processes for Micro-Nano Machining

J. Korean Soc. Precis. Eng.. 2008;25(3):44-49. Published online March 1, 2008

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
bib — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

Simulation of Focused Ion Beam Processes for Micro-Nano Machining

J. Korean Soc. Precis. Eng.. 2008;25(3):44-49. Published online March 1, 2008

Articles

Page Path

Simulation of Focused Ion Beam Processes for Micro-Nano Machining

Full Article

Citations

CITE

Download Citation

Format:

Include:

ABOUT

BROWSE ARTICLES

EDITORIAL POLICIES

FOR CONTRIBUTORS