We present a 3-PRS compliant parallel manipulator actuated by PZTs. The motion ranges are 400-㎛ translation to the z-direction and 5.7-mrad rotation about any axis on the x-y plane. A mechanical amplifier whose advantage is approximately 5.5 is designed and integrated with flexure revolute and spherical joints in a monolithic way. We evaluated the performance of the system: kinematic and dynamic characteristics. In kinematic point of view, the flexures play the roles of conventional mechanism but any nonlinearity such as dead-zone and backlash, which make it possible to achieve the steady-state resolution less than 0.1 ㎛. The system shows resonance near 86 ㎐ with high magnitude and, therefore, poor transient response. But the settling is faster when the flexures are strained higher.
