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Analysis of Fluid Flow in the Linear Cell Source for Organic Semiconductor Thin Film Deposition

In-Chul Kwak, Young-Soo Yang, Bum Ho Choi, Young Mi Kim
JKSPE 2009;26(10):74-80.
Published online: October 1, 2009
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This paper presents a study on fluid flow analysis of organic semiconductor thin film deposition process using the computational numerical method. In the production process, the thickness of deposited organic thin film depends on distribution of nozzle size in the linear cell system, so we analyze to decide the optimal nozzle system for uniform thickness of organic thin film. The results of deposited thickness of thin film by numerical analysis are in good agreement with those of the experimental measurements.

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Analysis of Fluid Flow in the Linear Cell Source for Organic Semiconductor Thin Film Deposition
J. Korean Soc. Precis. Eng.. 2009;26(10):74-80.   Published online October 1, 2009
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Analysis of Fluid Flow in the Linear Cell Source for Organic Semiconductor Thin Film Deposition
J. Korean Soc. Precis. Eng.. 2009;26(10):74-80.   Published online October 1, 2009
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