This study introduces about development of multi-DOF ultrasonic motor that are composed of a bar-shaped stator and a spherical rotor. The ultrasonic motor is a motor which is operated by vibrations over frequency of 20kHz. The multi-DOF ultrasonic motor will be developed by expanding the basic theory of existing 1-DOF ultrasonic motor. It can generate 3-DOF rotation of the rotor around perpendicular axes using 3 vibration modes of stator. By using finite element methods, the optimal dimension of stator is decided and made the components of stator. When we apply the multi-DOF ultrasonic motor composed of rotor and stator to the driving test system, it will be checked whether the motor can be driven at the direction of 3-DOF or not. And it is proposed how the simulation of square bar shaped multi-DOF ultrasonic motor is accomplished.
