Analysis and Control of Contact Mode AFM

H.W. Jung; J.Y. Shim; D.G. Gweon

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접촉모드 AFM의 시스템 분석 및 제어

정회원, 심종업, 권대갑

Analysis and Control of Contact Mode AFM

H.W. Jung, J.Y. Shim, D.G. Gweon

JKSPE 1998;15(3):99-106.

Published online: March 1, 1998

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Keywords: AFM(Atomic Force Microscopy 원자간력 현미경),tube scanner(튜브 스캐너),laser deflection method(레이져빔 반사법),system identification(시스템 특성확인),Equi-force control(등력유지제어)

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Analysis and Control of Contact Mode AFM

J. Korean Soc. Precis. Eng.. 1998;15(3):99-106. Published online March 1, 1998

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Analysis and Control of Contact Mode AFM

J. Korean Soc. Precis. Eng.. 1998;15(3):99-106. Published online March 1, 1998

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접촉모드 AFM의 시스템 분석 및 제어

Analysis and Control of Contact Mode AFM

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