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높은 균일도 확보를 위한 제논 아크 광원의 조명광학계 설계 및 구현

Design and Implementation of an Illumination Optical System for a Xenon Arc Light Source with High Uniformity

Journal of the Korean Society for Precision Engineering 2025;42(5):405-408.
Published online: May 1, 2025

1 서울과학기술대학교 기계시스템디자인공학과

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#E-mail: JLee@seoultech.ac.kr TEL: +82-2-970-6343
• Received: April 1, 2025   • Revised: April 14, 2025   • Accepted: April 17, 2025

Copyright © The Korean Society for Precision Engineering

This is an Open-Access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (http://creativecommons.org/licenses/by-nc/3.0) which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.

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  • We present a xenon arc source-based illumination system designed to achieve high spatial uniformity and efficient light collection across a wide spectral range. The proposed optical system comprised an ellipsoid reflector, diffuser, motorized iris, and collimation lens to optimize beam homogenization. Non-sequential ray-tracing simulations were performed to evaluate angular irradiation distributions of various diffusers and the overall beam profile uniformity. The system was experimentally implemented using a fused silica holographic diffuser optimized for high-power operation, with a motorized iris enabling precise control of light intensity. The resulting beam profile exhibited a well-defined flat-top shape, with a beam uniformity of approximately 95% evaluated according to the ISO 13694 standard. The developed illumination system demonstrated its ability to produce highly uniform illumination, suitable for various optical applications including spectroscopy, precision measurement, and optical imaging.
제논 아크 광원은 자외선에서 적외선에 이르는 광대역 스펙트럼을 높은 광출력으로 확보할 수 있는 장점으로 인해, 분광분석, 정밀 계측, 광학 이미징 등 다양한 광학 응용 분야에서 널리 사용되고 있다. 특히 고휘도 및 안정적인 스펙트럼 특성으로 인해 백색광원으로서의 활용도가 높으며, 상용화된 광원 구조에서는 다양한 형태의 비구면 반사경을 적용하여 집광 효율을 극대화하고 있다[1].
제논 아크 광원은 활용 목적에 따라 시준광원(Collimated Source) 또는 초점광원(Focused Source)으로 구현될 수 있으며, 이 경우 Fig. 1과 같이 각각 포물면(Paraboloid Surface) 또는 타원면(Ellipsoid Surface)을 반사경으로 적용할 수 있다. 하지만 두 경우 모두 제논 아크 광원을 설치하기 위해 중심 개구부(Central Aperture)가 필요하며, 전력 공급을 위한 배선 등의 구조적 요소로 인해 Fig. 1(c)와 같이 광 균일도가 저하되는 단점이 존재한다. 이러한 문제를 해결하기 위해서는 조명 광학계 내에서 균일도를 확보하는 균일화 장치(Homogenizer)의 적용이 필수적이다. 기존 연구에서는 고균일도 광 분포 확보를 위한 다양한 균일화(Homogenization) 기법이 제시되었으며, 대표적으로 광 도파관(Light Pipe), 회절 광학부품, 마이크로 렌즈 어레이(Microlens Array, MLA), 확산판(Diffuser) 기반 기술 등이 보고되고 있다[2-6]. 이 중에서도 확산판 및 마이크로 렌즈 어레이는 비레이저 광원에 대해서도 높은 광투과율과 넓은 스펙트럼 범위에서 적용 가능하다는 이점이 있으며, 특히 타원형 반사경과 조합 시 Fig. 1(c)와 같은 도넛형(Donut-shaped) 광 분포를 효과적으로 제거하고 광 균일도를 향상시킬 수 있다[5,6].
Fig. 1

Xenon light source and reflector configurations for high throughput illumination (a) Paraboloid reflector for generating a collimated beam, (b) Ellipsoid reflector for generating a focused beam, and (c) Donut-shaped beam profile resulting from the central aperture and structural shadowing

KSPE_2025_v42n5_405_f001.jpg
본 연구에서는 자외선부터 적외선 영역까지 넓은 스펙트럼을 갖는 제논 아크 광원을 기반으로 하여, 높은 공간 균일도를 확보할 수 있는 조명광학계의 설계 및 구현을 수행하였다. 이를 위해 타원형 반사경, 확산판, 시준 렌즈 등으로 구성된 복합 광학계를 구성하고, 균일도 향상을 위한 주요 설계 변수들을 분석하였다. 또한, 구현된 시스템의 성능을 실험적으로 평가하고 균일도 개선 효과를 검증하였다.
본 연구에서는 제논 아크 광원의 높은 광출력과 넓은 스펙트럼 특성을 효율적으로 활용하기 위해 Fig. 2와 같이, 타원형 반사경(Ellipsoid Reflector), 확산판(Diffuser), 조리개(Iris), 시준렌즈(Lens)로 구성된 조명광학계를 설계하였다. 광원으로부터 방출된 빛은 타원면 반사경에 의해 제1 초점에서 제2 초점 방향으로 집광되며, 제2 초점 위치 인근에는 확산판을 배치하여 공간적 균일도를 향상시켰다. 이후 배치된 조리개는 확산 후 입사되는 개구 크기를 제어하며, 이를 통해 렌즈에 입사되는 유효광을 제한할 수 있다. 최종적으로 시준 렌즈는 확산된 광을 평행광 형태로 변환하여 관측면(Observe Plane) 상에 균일한 조명분포를 형성하도록 설계하였다.
Fig. 2

Schematic diagram of a homogenized illumination optical system using an ellipsoid reflector. Light emitted from the xenon arc source is collected and directed by the ellipsoid reflector toward a diffuser, which randomizes the ray directions. The iris diaphragm controls the aperture size, and the collimating lens transforms the diverging rays into a uniform beam at the observe plane

KSPE_2025_v42n5_405_f002.jpg
설계된 조명광학계의 성능을 평가하기 위해 Fig. 3과 같이 비순차적 광선 추적(Non-sequential Ray-tracing) 기법을 이용하여 시뮬레이션을 수행하였다. 고출력 제논광원의 경우, 100 W 이상의 출력이 사용되기 때문에 고온 환경에서도 안정적으로 작동할 수 있는 상용 용융실리카 홀로그래픽 확산판(Fused Silica Holographic Diffusers)을 설계에 적용하였다[7].
Fig. 3

Simulation results of the Xe source illumination system (a) Angular irradiation distribution of various diffusers, with surface roughness optimized to achieve results equivalent to the specifications of commercial products, (b) Ray-tracing of the illumination system performed using the non-sequential mode of the ray-tracing tool, and (c) Beam profile obtained by the simulation detector, demonstrating a clear flat-top profile

KSPE_2025_v42n5_405_f003.jpg
먼저, 다양한 확산판의 각도별 방사 분포를 분석하기 위해 시뮬레이션을 수행하였다. Fig. 3(a)는 확산판의 표면 거칠기를 상용 제품의 확산각에 해당하는 5o에서 25o와 동일한 결과를 얻을 수 있도록 최적화한 후, 방사 분포를 확인한 결과를 보여준다. 해당 확산각은 입사빔이 확산판 통과 후 빔의 각분포 (Angular Distribution)의 반치폭 각도로 평가된다. 확산 각도가 증가함에 따라 방사 분포의 각도 범위가 넓어지는 경향을 보였으며, 상용제품의 사양과 일치하는 것을 확인하였다[7].
Fig. 3(b)는 조명광학계의 전체적인 광선 경로를 나타낸다. 비순차적모드(Non-sequential Mode)를 활용하여 광선 추적을 수행하였으며, 타원면 반사경으로 집광된 광선이 확산판을 통과하여 시준 렌즈에 입사되도록 설계하였다. 이후 렌즈를 통과 한광선은 검출기로 도달하며, 검출기에서 측정된 빔 프로파일을 분석하였다. 이 과정에서 각 구성 요소의 위치 및 배치를 최적화하여 효율적인 광 전달 및 균일도를 확보하였다.
Fig. 3(c)는 시뮬레이션 검출기를 통해 얻어진 빔 프로파일을 보여준다. 좌측 그림은 2차원 이미지 형태로 나타낸 빔의 분포를, 우측 그래프는 횡단면의 강도 분포를 수치적으로 표현한 것이다. 시뮬레이션 결과, 명확한 Flat-top 프로파일 확인이 가능하였다.
시뮬레이션으로 도출된 빔의 균일도를 평가하기 위해 레이저 빔 및 관련 광학 장치의 공간적 전력 및 에너지 밀도 분포평가 기준을 제시하는 ISO 13694를 적용하였다[8]. 해당 표준은 빔의 균일도 및 평탄도 평가를 포함하여 다양한 레이저 응용 분야에서 중요한 기준으로 사용되며, 특히 빔 균일도(Beam Uniformity)와 평탄도 계수(Flatness Factor)는 레이저 빔의 품질을 평가하는 지표를 제시한다. 빔 균일도 Uη는 아래 수식을 통해 평가된다.
(1)
Uη=1EηaveN1AηiΣxΣyE(x,y)-Eηave2
위 수식에서 Uη(z)는 빔 균일도, Eηave는 평균 에너지 밀도, Aηi는 유효 면적, E(x,y,z)는 공간좌표X,Y에서의 에너지 밀도에 해당한다. 이를 기반으로 빔의 균일도는 평균 에너지 밀도 대비RMS 편차를 이용하여 평가되며, 값이 낮을수록 높은 균일도로 평가된다. 시뮬레이션을 통해 도출된 조명광학계의 빔 균일도를 평가한 결과, 확산판 이전의 빔과 광검출단에서의 빔의 균일도는 값은 각각 21과 0.8 수준으로 나타났다. 이를 기반으로 도출된 평탄도 계수는 각각 0.56과 0.99로 균일화기를 통과하지 않은 도넛형 빔을 균일도 99% 수준의 높은 균일도로 향상할 수 있음을 확인하였다.
시뮬레이션을 통해 도출된 조명광학계의 성능을 평가하기 위해 Fig. 4와 같은 실험 장치를 구성하였다. 제논광원은 타원형반사경과 조립되어 광 출력을 효율적으로 집광할 수 있도록 제작되었으며 타원형 반사경으로부터 방출된 광은 확산판을 통과하여 균일성을 개선한 후, 조리개에 입사된다. 조리개는 광량 조절을 위해 모터로 구동되도록 설계되었으며, 외부에서 원격 제어가 가능하도록 구성하였다. 조리개를 통과한 광은 렌즈 베럴(Lens Barrel)을 지나며 평행광으로 변환된다. 이 과정을 통해 확산된 빔은 균일화된 프로파일의 빔으로 형성되며, 최종적으로 관측면에서 측정이 이루어진다.
Fig. 4

Experimental setup of the Xe source illumination system. The Xe source is assembled with an ellipsoid reflector, and the emitted light passes through a diffuser before entering the iris. The iris, which is used for controlling the light intensity, is motor-driven to allow external adjustment. After passing through the second focal point, the light is directed through a lens barrel for collimation, resulting in a homogenized beam profile

KSPE_2025_v42n5_405_f004.jpg
Fig. 5는 실험적으로 얻어진 빔 프로파일을 나타낸다. Fig. 5(a)는 관측면에서 카메라로 촬영된 빔의 2차원 이미지에 해당하며 빔의 전체적인 형태는 49.2 mm 직경을 가지는 원형으로 균일한 밝기를 유지하는 특징을 보였다. Figs. 5(b)는 5(a)에서의 횡단면 강도 분포를 그래프로 나타낸 결과로, Flat-top 프로파일을 명확히 확인할 수 있다. 측정 결과, 중심부의 강도가 일정하게 유지되며, 가장자리에서 급격히 감소하는 형태를 보였다. 실험으로 도출된 빔 프로파일을 앞서 시뮬레이션 결과에 적용하였던 ISO 13694에 따라 정량적으로 평가하였으며 Uη 값은 1.52%, 이를 통해 도출된 하였으며 평탄도 계수는 95% 수준으로 평가되었다.
Fig. 5

Experimental results of beam profile (a) Beam profile, and (b) Flat-top cross-section of the collimated beam

KSPE_2025_v42n5_405_f005.jpg
본 연구에서는 제논 아크 광원의 높은 광출력과 넓은 스펙트럼 특성을 효과적으로 활용하기 위해 타원형 반사경, 확산판, 조리개, 시준 렌즈로 구성된 조명광학계를 설계하고, 성능 평가를 수행하였다. 비순차적 광선 추적기법을 이용하여 조명광학계의 성능을 시뮬레이션 하였으며, 다양한 확산판의 각도별 방사 분포를 분석하여 균일도를 최적화한 후 ISO 13694 표준에 따라 빔 균일도를 평가한 결과 99% 수준의 균일도가 도출되었다. 설계된 조명광학계를 실험장치로 구성한 결과, 49.2 mm 직경을 가지는 원형 빔이 Flat-top으로 균일한 밝기를 유지하는 특징을 보였으며, 시뮬레이션과 동일한 기준으로 평가한 결과 95% 수준으로 시뮬레이션과 유사한 균일도가 확보되었음을 확인하였다. 본 연구의 결과는 광학 조명 시스템 설계 및 평가에 유용하게 활용될 수 있을 것으로 보이며, 높은 출력과 균일도를 요구하는 분광 분석, 정밀 계측 등의 분야에 응용될 수 있을 것으로 기대된다.
이 연구는 서울과학기술대학교 교내 일반과제 연구비 지원으로 수행되었습니다.
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    Zheng, H., Sun, H., Zhang, H., Li, Y., Guo, H., Zhang, L., Li, R., Yin, Q., (2022), Simulation and experimental research on a beam homogenization system of a semiconductor laser, Sensors, 22(10), 3725.
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Tran Duc Hieu
KSPE_2025_v42n5_405_bf001.jpg
M.Sc. candidate in the Department of Mechanical System and Robot Engineering, Seoul National University of Science and Technology (SeoulTech).
Yeojun Park
KSPE_2025_v42n5_405_bf002.jpg
B.Sc. candidate in the Department of Mechanical System Design Engineering, Seoul National University of Science and Technology (SeoulTech).
Jong-Hun Park
KSPE_2025_v42n5_405_bf003.jpg
M.Sc. candidate in the Department of Mechanical System Design Engineering, Seoul National University of Science and Technology (SeoulTech).
Woojeong Lee
KSPE_2025_v42n5_405_bf004.jpg
Ph.D. candidate in the Department of Mechanical System Design Engineering, Seoul National University of Science and Technology (SeoulTech).
Joohyung Lee
KSPE_2025_v42n5_405_bf005.jpg
Associate Professor in the Department of Mechanical System Design Engineering, Seoul National University of Science and Technology (SeoulTech).

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Design and Implementation of an Illumination Optical System for a Xenon Arc Light Source with High Uniformity
J. Korean Soc. Precis. Eng.. 2025;42(5):405-408.   Published online May 1, 2025
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Design and Implementation of an Illumination Optical System for a Xenon Arc Light Source with High Uniformity
J. Korean Soc. Precis. Eng.. 2025;42(5):405-408.   Published online May 1, 2025
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Design and Implementation of an Illumination Optical System for a Xenon Arc Light Source with High Uniformity
Image Image Image Image Image
Fig. 1 Xenon light source and reflector configurations for high throughput illumination (a) Paraboloid reflector for generating a collimated beam, (b) Ellipsoid reflector for generating a focused beam, and (c) Donut-shaped beam profile resulting from the central aperture and structural shadowing
Fig. 2 Schematic diagram of a homogenized illumination optical system using an ellipsoid reflector. Light emitted from the xenon arc source is collected and directed by the ellipsoid reflector toward a diffuser, which randomizes the ray directions. The iris diaphragm controls the aperture size, and the collimating lens transforms the diverging rays into a uniform beam at the observe plane
Fig. 3 Simulation results of the Xe source illumination system (a) Angular irradiation distribution of various diffusers, with surface roughness optimized to achieve results equivalent to the specifications of commercial products, (b) Ray-tracing of the illumination system performed using the non-sequential mode of the ray-tracing tool, and (c) Beam profile obtained by the simulation detector, demonstrating a clear flat-top profile
Fig. 4 Experimental setup of the Xe source illumination system. The Xe source is assembled with an ellipsoid reflector, and the emitted light passes through a diffuser before entering the iris. The iris, which is used for controlling the light intensity, is motor-driven to allow external adjustment. After passing through the second focal point, the light is directed through a lens barrel for collimation, resulting in a homogenized beam profile
Fig. 5 Experimental results of beam profile (a) Beam profile, and (b) Flat-top cross-section of the collimated beam
Design and Implementation of an Illumination Optical System for a Xenon Arc Light Source with High Uniformity