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Investigated New Thin Films based on Zn-doped MgO for Optoelectronic Devices
Nadjat Chaouch, Amira Sbaihi, Said Lakel, Abdelghani Lakel, Said Benramache
J. Korean Soc. Precis. Eng. 2026;43(9):987-996.
Published online September 1, 2026
DOI: https://doi.org/10.7736/JKSPE.026.00019
In this work, Mg1-xZnxO thin films were deposited on glass substrates by the pneumatic spray technique at 450°C using a 0.15 M precursor solution of magnesium acetate and zinc acetate. The effect of Zn content (x = 0, 0.3, 0.5, and 0.7%) on the structural, morphological, optical, and electrical properties of the films was examined. XRD analysis showed that all films adopted a cubic MgO structure with diffraction peaks from the (111), (200), and (220) planes, and the crystallite size grew from 8.12 to 12.49 nm as the Zn content increased. SEM images indicated that moderate Zn incorporation improved film homogeneity, whereas higher Zn contents promoted agglomeration and surface roughening. The films transmitted well in the visible region, and the optical band gap widened from 3.56 to 3.93 eV at x = 0.3. The Urbach energy also rose with Zn content, reaching a maximum of 0.695 eV at x = 0.7, which indicates greater structural disorder. FTIR spectra confirmed that Zn incorporation modifies the chemical bonding network. The sheet resistance increased markedly with Zn content, demonstrating the strong influence of Zn doping on the optical and electrical properties of MgO thin films.
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Optimization of Electrode Interface Control Process of Soft Electronic Devices for Low Energy Consumption
Seojin Moon, Taeheon Kim, Minkyu Park, Hyunseok Shim
J. Korean Soc. Precis. Eng. 2026;43(2):175-181.
Published online February 1, 2026
DOI: https://doi.org/10.7736/JKSPE.025.104
In this study, we demonstrate a well-established strategy for controlling the threshold voltage (Vth) in organic thin-film transistors (OTFTs) by applying uniform gold nanoparticle (AuNP) coatings onto silver nanowire (AgNW) electrodes using a galvanic replacement process in the presence of NaCl. This approach highlights the potential for low-energy consumption operation. The AuNP coatings effectively adjust the work function of the AgNW electrodes to better match that of the organic semiconductor. As a result, the OTFT devices show significantly reduced threshold voltages, enhancing charge injection efficiency and lowering the operating voltage. Additionally, when used as synaptic transistors, the optimized Aucoated AgNW composite electrodes demonstrate superior neuromorphic performance, including a lower maximum drain voltage (VDS), indicating a potential for improved energy efficiency per spike event. This advancement marks a critical step toward developing low-power neuromorphic devices and low-voltage flexible electronics. Our work establishes a practical methodology for quantitatively and reproducibly controlling Vth through precise modulation of metal coating uniformity, providing a solid technological foundation for future optimization of organic electronic devices.
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Specials

The Design of an Electrode Performance Evaluation Platform of Low-temperature Solid Oxide Fuel Cells for High-efficiency Biogas Energy Conversion
Sanghoon Ji, Weonjae Kim, Soyoung Baek
J. Korean Soc. Precis. Eng. 2025;42(12):1011-1020.
Published online December 1, 2025
DOI: https://doi.org/10.7736/JKSPE.025.00018
This study presents a performance evaluation platform for sputtered thin-film electrodes used in biogas-driven, low-temperature solid oxide fuel cells (SOFCs). The design considerations include electrolyte material composition and thickness, anode material composition and thickness, anode fuel composition, and cathode composition and thickness, all derived from a review of existing literature. For the electrolyte, we propose a thickness of 100 μm for the main electrolyte made of gadolinium-doped ceria (GDC) and 0.1 μm for the auxiliary electrolyte made of scandia-stabilized zirconia. In terms of anode fabrication, we suggest a material composition of Ru/Ni-Cu-GDC, with thicknesses of 1 μm for Ni-Cu-GDC and a few nanometers for Ru in the nanoporous anode. For the anode fuel supply, we recommend mole ratios of 45% to 75% CH4 and 25% to 55% CO2 to assess the impact of biogas composition on power performance. Lastly, for the cathode, we propose a material composition of Pt-Ti-samarium-doped ceria with a thickness of 100 nm for the nanoporous structure.
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Fabrication of Yttria and Zirconia Co-sputtering Cathode Functional Layer for Low Temperature Solid Oxide Fuel Cells
Taehyeon Lee, Seungbong Oh, Davin Jeong, Soonwook Hong
J. Korean Soc. Precis. Eng. 2025;42(12):997-1002.
Published online December 1, 2025
DOI: https://doi.org/10.7736/JKSPE.025.00013
A yttria-stabilized zirconia (YSZ) cathode functional layer (CFL) was fabricated using a co-sputtering process to improve the oxygen reduction reaction (ORR) in solid oxide fuel cells (SOFCs). To optimize the yttria molar percentage and achieve a nano-granular structure with enhanced grain boundary density, the DC sputtering power for the metallic yttrium target was varied at 10, 30, and 50 W. Structural and compositional analyses were performed using scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), and X-ray diffraction (XRD). The results indicated that a DC power of 30 W resulted in a well-developed grain structure with high grain boundary density and an yttria composition close to the optimal molar percentage of 8-10 mol %. Under these optimized conditions, the SOFC with the co-sputtered YSZ CFL achieved a maximum power output of 9.22 mW/cm² at 450oC, representing approximately a 43% enhancement compared to the reference cell. This highlights the significant potential of co-sputtering for future low-temperature SOFC applications.
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SPECIAL

Laser Ablation Patterning of Metal Thin Films for On-demand of Shadow Mask Patterning in Vacuum Deposition
Beomsun Do, Seunghun Lee, Hyunho Lee, Hoon Jeong, Joel Ndikumana, Kunsik An
J. Korean Soc. Precis. Eng. 2025;42(10):775-782.
Published online October 1, 2025
DOI: https://doi.org/10.7736/JKSPE.D.25.00001

This study explores the use of laser ablation technology for creating on-demand shadow masks, which are essential in the fabrication of thin film transistor (TFT) devices. Traditional methods for producing shadow masks often encounter significant challenges, such as high costs, lengthy production times, and difficulties in achieving fine, high-resolution patterns. To address these issues, this study introduces a method for manufacturing shadow masks using fiber laser-based laser ablation. Key laser parameters, including frequency and power, were optimized throughout the research. Systematic experimentation revealed that a frequency of 20 kHz and a power output of 14 W enabled the precise and uniform creation of patterns with a 50 μm channel spacing. When these custom shadow masks were employed in the TFT fabrication process, the resulting devices exhibited stable and reliable electrical performance. The findings suggest that laser ablation-based on-demand shadow mask technology offers a cost-effective and flexible solution for producing large-area, high-resolution TFTs. Additionally, this approach significantly reduces the prototyping cycle, making it ideal for rapid development and iterative testing in research and development environments.

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Articles
Pinhole Detection in Thin Film Solid Oxide Electrolytes Using Selective Adsorption of Ag Nanoparticles via a Spark Discharge Generator
Doyoon Kim, Ikwhang Chang, Jong Dae Baek
J. Korean Soc. Precis. Eng. 2025;42(6):441-446.
Published online June 1, 2025
DOI: https://doi.org/10.7736/JKSPE.025.024
Pinhole-free ionic conductors are critical to achieve optimal performance in thin film-solid oxide fuel cells (TF-SOFCs). However, nanoscale defects, especially pinholes, can induce current leakage and contribute to cell failure by creating electrical short circuits. This study introduced a novel methodology for detecting pinholes in yttria-stabilized zirconia (YSZ) thin-film solid oxide electrolytes. The approach utilized selective adsorption of silver (Ag) nanoparticles generated via a spark discharge generator (SDG). Analytical techniques, including focused ion beam (FIB), scanning electron microscopy (SEM), and transmission electron microscopy (TEM), were employed to investigate interactions between Ag nanoparticles and nanoscale defects. Results showed that nanoparticle-based diagnostic methods were efficacious for defect characterization, offering a solution for enhancing the quality of thin-film electrolytes.
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Characterization of a Copper Thin Film Using the Surface Acoustic Wave Measurement Technique
Taehyung Kim, Yun Young Kim
J. Korean Soc. Precis. Eng. 2024;41(3):183-189.
Published online March 1, 2024
DOI: https://doi.org/10.7736/JKSPE.023.125
The elastic property of a copper (Cu) thin film was investigated using the surface acoustic wave (SAW) measurement technique. The Cu film was deposited on a quartz substrate using a direct current magnetron sputter and its surface morphology was inspected using atomic force microscopy. Time-domain waveforms of the SAW on the film were acquired at different propagation distances to estimate the Young’s modulus of Cu such that the experimentally-obtained dispersion curve can be compared to the analytical result calculated using the Transfer Matrix method for curve-fitting. Results showed that the film’s elastic property value decreased by 18.5% compared to that of the bulk state, and the scale effect was not significant in the thickness range of 150-300 nm, showing good agreement with those by the nanoindentation technique. The property, however, increased by 15.5% with the grain coarsening.
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Resistant Characteristics of AAO-Based Thin Film Solid Oxide Fuel Cells Using Ni-GDC Anode by GLAD Method
Jaewon Yoo, Myung Seok Lee, Yang Jae Kim, Suk Won Cha
J. Korean Soc. Precis. Eng. 2023;40(4):335-340.
Published online April 1, 2023
DOI: https://doi.org/10.7736/JKSPE.022.135
In this study, we fabricated thin film solid oxide fuel cells on nanoporous anodic aluminum oxide (AAO) substrate for low-temperature operation using the all-through sputtering method. To deposit up to a three-micrometer thick anode with both porosity and electrical conductivity, we used the glancing angle deposition and co-sputtering methods. For the anode materials, we used nickel gadolinium-doped-ceria (Ni-GDC) mixed ionic and electronic conductor (MIEC), which improved hydrogen oxidation reaction reactivity at the anode side. TF-SOFCs were successfully operated at 500℃, and 223.6 mW/cm² was their highest measured maximum power density. We conducted structural and electrochemical analyses to figure out cells’ unique resistant characteristics; ohmic resistance through the anode thin film and polarization resistance of reaction area near the narrowed anode pores. We found how the anode thin film thickness affects the current collecting performance and the anode reactivity, and their effects were qualitatively and quantitatively compared.
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Development of Thin Film Solid Oxide Fuel Cell for Direct Use of Hydrocarbon Fuels
Gu Young Cho, Yoon Ho Lee
J. Korean Soc. Precis. Eng. 2022;39(10):773-777.
Published online October 1, 2022
DOI: https://doi.org/10.7736/JKSPE.022.039
Energy devices in modern society require high efficiency, carbon neutrality, and the capability of distributed power generation. A fuel cell is an energy conversion device, that satisfies all of these requirements. However, most fuel cells use hydrogen as a fuel, and more than half of hydrogen is currently produced through hydrocarbon reforming, resulting in significant energy loss. Additionally, the storage and supply of hydrogen require costly systems, and a large amount of energy is consumed during compression or liquidation processes. This paper develops a solid oxide fuel cell, that uses hydrocarbon directly as fuel to resolve this problem. A small amount of Ru is mixed with the Ni-based electrode, for the effective internal reforming of hydrocarbons. For rapid deposition of YSZ electrolytes, we developed a reactive sputtering process, using a DC power source. The developed thin-film solid oxide fuel cell, showed a performance of 76 mW/cm² at 500℃ using methane as fuel.
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Cathodic Functional Layer via Sputtering and Atomic Layer Deposition for Thin-Film Solid Oxide Fuel Cells
Jaeyoon Lee, Sanghyeok Lee, Hyeontaek Kim, Yongchan Park, Geunjin Lee, Changheon Lee, Sunggyu Choi, Soonwook Hong
J. Korean Soc. Precis. Eng. 2022;39(2):97-102.
Published online February 1, 2022
DOI: https://doi.org/10.7736/JKSPE.021.123
In this study, Yttria-stabilized zirconia (YSZ) functional layers were applied with different thin-film fabrication process such as sputtering and atomic layer deposition (ALD) to enhance oxygen reduction reaction (ORR) for solid oxide fuel cells. We confirmed that the YSZ functional layer deposited with sputtering showed relatively low grain boundary density, while the YSZ functional layer deposited with the ALD technique clearly indicated high grain boundary density through scanning electron microscopy (SEM) and X-ray diffractometry (XRD) results. The YSZ functional layer coated with the ALD technique revealed that more ORR kinetics can occur using high grain boundary density than the functional layer deposited with sputtering. The peak power density of the SOFC deposited with ALD YSZ indicates 2-folds enhancement than the pristine SOFC.
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Unconventional Additive Manufacturing for Multiscale Ceramic Structures
Hyo Jun Lee, Young Tae Cho, Seok Kim
J. Korean Soc. Precis. Eng. 2021;38(9):639-650.
Published online September 1, 2021
DOI: https://doi.org/10.7736/JKSPE.021.072
Nature-inspired architected materials have been widely used to achieve efficient structural materials by harnessing their cellular and hierarchical structures. For example, biological materials observed in bone, shell, nacre, and wood contain constituents, ranging from nanometers to centimeters, arranged in an ordered hierarchy. Because of their composited structures that contain micro and nanoscale building blocks arranged in an ordered hierarchy and the material size effect in the mechanical strength of nano-sized solids, bioceramic materials are mechanically robust and lightweight. The design principles offered by hard biological materials of multiscale composite structures can assist in the creation of advanced ceramic architectures. In addition, the evolution of additive manufacturing technologies has enabled the fabrication of materials with intricate cellular architected materials. In this review, we discussed advanced additive manufacturing for the fabrication of nature-inspired multiscale ceramic structures by combining conformal thin-film coating technique with conventional additive manufacturing methods.

Citations

Citations to this article as recorded by  Crossref logo
  • SEM Image Quality Improvement and MTF Measurement Technique for Image Quality Evaluation Using Convolutional Neural Network
    Chan Ki Kim, Eung Chang Lee, Joong Bae Kim, Jinsung Rho
    Journal of the Korean Society for Precision Engineering.2023; 40(4): 275.     CrossRef
  • 323 View
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  • Crossref
Preparation of SrCo0.8Nb0.1Ta0.1O3-δ as a Cathode for Solid Oxide Fuel Cells by Pulsed Laser Deposition
Sangbong Ryu, Wonjong Yu, Arunkumar Pandiyan, Sanghoon Lee, Wonyeop Jeong, In won Choi, Myung Seok Lee, Suk Won Cha
J. Korean Soc. Precis. Eng. 2020;37(1):83-87.
Published online January 1, 2020
DOI: https://doi.org/10.7736/JKSPE.019.051
Recently, new perovskite cathode material, SrCo0.8Nb0.1Ta0.1O3-δ (SCNT) was reported, showing high oxygen reduction reaction (ORR) activity. This study demonstrates thin film deposition of SCNT by pulsed laser deposition technique applied to anodic aluminum oxide (AAO) based thin-film solid oxide fuel cells (TF-SOFCs) to assess the possibility of SCNT application to TF-SOFCs. The SCNT powder and the target were prepared by the solid state reactive sintering method (SSRS). This target was then mounted to the pulsed laser depositing machine and deposited on the Si wafer, and the nano-porous substrate, AAO. The physical structure and the chemical phase were investigated by the field emission scanning electron microscope, focused ion beam scanning electron microscope, and X-ray diffraction. On the top of the AAO, thin Pt film and yttria stabilized zirconia (YSZ) were first deposited by sputtering and the SCNT was deposited on the top of it afterward. The open circuit voltage of AAO cell was tested at 500°C, and successful polarization activity of SCNT was observed.
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Experimental Analysis of Performance Variation on Thin Film Solid Oxide Fuel Cell with Different Cathode Area Sizes
Jong Dae Baek, Ikwhang Chang
J. Korean Soc. Precis. Eng. 2019;36(12):1183-1187.
Published online December 1, 2019
DOI: https://doi.org/10.7736/KSPE.2019.36.12.1183
To study the geometrical scale dependency of thin film solid oxide fuel cells (SOFCs), we fabricated three thin films SOFCs with the same cross-sectional structure but with different electrode areas of 1, 4 and 9 ㎟. Since the activation and ohmic losses of SOFCs depend on their active region, we examined the variations of the power density of the cells with a Pt (anode)/sputtered YSZ/Pt (cathode) structure. We found that a cathode electrode with a low aspect ratio may suffer from high ohmic and activation losses because of the geometrical scale dependency.
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Measurement of the Young’s Modulus of a Ceramic Thin-Film Using Gigahertz Longitudinal Bulk Waves
Yun Young Kim
J. Korean Soc. Precis. Eng. 2019;36(6):531-535.
Published online June 1, 2019
DOI: https://doi.org/10.7736/KSPE.2019.36.6.531
Picosecond ultrasonic evaluation on the Young’s modulus of a ceramic thin-film was performed in the present study. A 100nm thick silicon nitride thin-film was deposited on a silicon wafer using the plasma enhanced chemical vapor deposition technique and gigahertz-frequency longitudinal bulk waves were excited in the film using a femtosecond laser setup. A thermoelastic equation was numerically solved using the finite difference method and compared to the experimental data to estimate the elastic property of the film. Results show that the present measurement technique can effectively evaluate the film’s Young’s modulus and it is recognized that the modulus is 60-70% lower than that of its bulk status. This study is expected to provide a way to characterize nanoscale ceramics with very high spatial and temporal resolutions for the design and analysis of microelectromechanical systems and thin-film based devices.
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The energy saving effect of reactant plasma in Atomic Layer Deposition (ALD) of ultrathin solid oxide fuel cell electrolyte was examined by measuring electrical current in real time. Actuating a plasma generator led to a remarkable change in electric current and therefore a Plasma Enhanced ALD (PE-ALD) Yttria-Stabilized Zirconia (YSZ) supercycle demanded ~12% higher process energy than a Thermal ALD (T-ALD) YSZ supercycle. Nonetheless, because PE-ALD YSZ electrolyte providing higher growth rate and higher gas tightness needed 2 times smaller cycle number compared to T-ALD YSZ electrolyte, applying oxygen plasma in ALD of YSZ electrolyte resultantly reduced total process energy by ~44%.
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