Skip to main navigation Skip to main content
  • E-Submission

JKSPE : Journal of the Korean Society for Precision Engineering

OPEN ACCESS
ABOUT
BROWSE ARTICLES
EDITORIAL POLICIES
FOR CONTRIBUTORS

Page Path

33
results for

"Chemical"

Article category

Keywords

Publication year

Authors

Funded articles

"Chemical"

Specials

A Review of in Operando Measurements of Local Temperature for Lithium-ion Batteries
Soyoung Park, Woosung Park
J. Korean Soc. Precis. Eng. 2025;42(12):1021-1035.
Published online December 1, 2025
DOI: https://doi.org/10.7736/JKSPE.025.00024
Sensing the internal temperature of lithium-ion batteries is particularly useful for reliable battery operation as both electrochemistry and mass transport are dictated by local temperature. In this article, we review in operando techniques to monitor the internal temperature of lithium-ion batteries during charging and discharging. We categorize existing techniques into two groups: invasive and non-invasive approaches. Invasive techniques include optical fibers, thermocouples, and resistance temperature detectors as a thermometer. Non-invasive methods cover the temperature estimation techniques, namely electrochemical impedance spectroscopy as well as X-ray thermometry. For both approaches, we review working principle of thermometry, pros and cons of each thermometry, and recent studies to tackle relevant technical challenges. This review provides useful information for internal temperature measurements, offering chances for thermally reliable battery operation.
  • 190 View
  • 12 Download
Electrochemical Evaluation of PrOx Capping Layer in LT-SOFCs via Sputtering Process
Ji Woong Jeon, Geon Hyeop Kim, Hyeon Min Lee, Jun Geon Park, Gu Young Cho
J. Korean Soc. Precis. Eng. 2025;42(12):1003-1010.
Published online December 1, 2025
DOI: https://doi.org/10.7736/JKSPE.025.00014
Solid Oxide Fuel Cells (SOFCs) are energy conversion devices known for their significantly higher power density compared to other fuel cell types. However, their high operating temperatures pose challenges related to thermal stability. To address this, research is focusing on Low-Temperature SOFCs (LT-SOFCs), which function at lower temperatures and exhibit enhanced electrochemical performance. While various electrode materials are utilized in SOFCs, platinum (Pt) stands out for its excellent electronic conductivity and catalytic activity. Unfortunately, at the operating temperatures of SOFCs, Pt tends to agglomerate, leading to a rapid reduction in the triple phase boundary (TPB) and a subsequent decline in electrochemical reactions. In this study, LT-SOFCs were fabricated with a Praseodymium Oxide (PrOx) capping layer applied to a porous Pt cathode using sputtering, with various thicknesses achieved by adjusting the deposition time. The electrochemical performance of the LT-SOFCs was measured at 500oC. Additionally, the degradation behavior of the LT-SOFCs was assessed by applying a constant voltage of 0.5 V for 48 hours. Scanning Electron Microscopy (SEM) analysis was also conducted on the PrOx capping layer thin films under the same operating conditions.
  • 324 View
  • 17 Download
FEM Studies of CMP Retainer Ring Using Metamodel
Do Yeong Jung, Seung Heon Lee, Jun Geon Park, Jae Phil Boo, Jung Woo Lee, Byoung Wan Kim, Gu Young Cho
J. Korean Soc. Precis. Eng. 2025;42(12):1065-1070.
Published online December 1, 2025
DOI: https://doi.org/10.7736/JKSPE.025.00007
This study introduces a novel retainer ring design aimed at mitigating the edge effect during chemical mechanical planarization. The innovative design features an arch-shaped geometry that creates a bending effect, thereby reducing excessive pressure on the wafer's edge. A two-dimensional axisymmetric finite element model was developed, and simulation data were utilized to create a metamodel. Multi-objective optimization was conducted using an evolutionary algorithm, focusing on the normal contact stress on the wafer surface. Representative Pareto-optimal designs were analyzed to assess the distribution of normal contact stresses. The results demonstrated that the proposed design significantly reduced peak normal stresses and enhanced stress uniformity, especially at the wafer edge. This optimized retainer ring is anticipated to improve wafer edge quality and increase semiconductor yield.
  • 160 View
  • 23 Download
Parametric Studies of Ionomer Content in PEMFC MEA with Different Humidity
Byung Gyu Kang, Hyeon Min Lee, Ye Rim Kwon, Sun Ki Kwon, Ki Won Hong, Seoung Jai Bai, Gu Young Cho
J. Korean Soc. Precis. Eng. 2025;42(12):975-980.
Published online December 1, 2025
DOI: https://doi.org/10.7736/JKSPE.025.00006
The ionomer content in the catalyst layer is a crucial design factor that affects the performance of polymer electrolyte membrane fuel cells (PEMFCs). However, the optimal ionomer content can vary based on the surrounding humidity levels. This study systematically evaluated the influence of the ionomer-to-carbon (I/C) ratio (0.00, 0.55, and 0.91) on PEMFC performance under fully humidified (RH 100%) and low-humidity (RH 25%) conditions. Membrane-electrode assemblies (MEAs) were fabricated using a spray coating technique, and their electrochemical properties were analyzed through polarization curves and electrochemical impedance spectroscopy (EIS). Under RH 100%, the MEA with an I/C ratio of 0.55 achieved the highest peak power density of 519.8 mW/cm2, indicating a successful balance between proton conductivity and gas transport. Conversely, under RH 25%, the best performance of 203.9 mW/cm2 was observed at an I/C ratio of 0.91. This shift is attributed to improved water retention at higher ionomer content, which reduced membrane dehydration and lowered both ohmic and Faradaic resistances. These findings highlight the dual role of the ionomer in facilitating proton transport and managing water balance, emphasizing the necessity of optimizing the I/C ratio according to operating conditions for stable and high-performing PEMFC operation.
  • 666 View
  • 40 Download

REGULAR

Electrochemical Impedance Analyses of ePTFE-reinforced Polymer Electrolyte Membrane-based PEMFC with Varying Thickness and Relative Humidity
Gyutae Park, Subin Jeong, Youngjae Cho, Junseo Youn, Jiwon Baek, Jooyoung Lim, Dongjin Kim, Taehyun Park
J. Korean Soc. Precis. Eng. 2025;42(11):901-907.
Published online November 1, 2025
DOI: https://doi.org/10.7736/JKSPE.025.052

The polymer electrolyte membrane fuel cell (PEMFC) generates electrical energy through electrochemical reactions and is a key technology for sustainable energy. The electrolyte membrane significantly affects performance under varying conditions. This study examines the impact of membrane thickness and relative humidity (RH) on PEMFC performance using j-V curves and electrochemical impedance spectroscopy (EIS). Experiments were conducted with membrane thicknesses of 30, 15, and 5 μm under RH conditions of 100%-100% and 100%-0%. Under RH 100%-100%, performance improved as the membrane thickness decreased, with values of 954, 1050, and 1235 mW/cm² for the 30, 15, and 5 μm membranes, respectively. The 5 μm membrane demonstrated a 23% performance improvement over the 30 μm membrane. Under RH 100%-0%, performances were 422, 642, and 852 mW/cm², with degradation rates of 55.8%, 39.0%, and 32.1%. The 5 μm membrane exhibited the lowest degradation rate, indicating superior performance under low humidity. These results suggest that thinner membranes generally enhance performance and maintain efficiency even in dry conditions.

  • 118 View
  • 7 Download
Articles
Fabrication of LSC Cathode for High-performance Solid Oxide Fuel Cell with Suppressed LSC/YSZ Interface Side Reactions
Jisung Yoon, Miju Ku, Hyojun Ahn, Hunhun Jung, Young-Beom Kim
J. Korean Soc. Precis. Eng. 2025;42(5):361-366.
Published online May 1, 2025
DOI: https://doi.org/10.7736/JKSPE.025.008
In this study, we introduce a novel flash light sintering (FLS) method to address the issue of secondary phase formation in conventional high-temperature thermal sintering processes. The microstructure and cross section of the Lanthanum strontium cobalt (LSC) air electrode were analyzed using field emission scanning electron microscopy (FE-SEM). The presence of secondary phases was evaluated using X-ray diffraction (XRD) and energy-dispersive spectroscopy (EDS) in SEM. Electrochemical performance was assessed using NiO-YSZ anode-supported LSC cathode cells at 750oC. The maximum power density of the thermally sintered LSC cathode at 900oC was 272.4 mW/cm², while the flash light sintered LSC cathode by 18.5 J/cm² achieved 2,222 mW/cm². These results demonstrate that the flash light sintering process can effectively prevent secondary phase formation and successfully sinter the electrode, thereby enhancing the performance and reliability of SOFCs.
  • 74 View
  • 5 Download
Evaluation of Electrochemical Performance of PEMFCs with Decontamination Devices at Marine Environments
Ye rim Kwon, Ho Jun Yoo, Byung Gyu Kang, Ki Won Hong, Sun Ki Kwon, Sanghoon Lee, Gu Young Cho
J. Korean Soc. Precis. Eng. 2025;42(1):57-63.
Published online January 1, 2025
DOI: https://doi.org/10.7736/JKSPE.024.109
In this study, we developed and evaluated a simple device for removing ionic impurities that affect the performance of a polymer electrolyte membrane fuel cell (PEMFC) in a marine environment. In such environments, PEMFCs may experience performance degradation due to the presence of Na+ and Cl- in the air. To address this issue, the decontamination device was designed with both heating and cooling components. This device was positioned between a humidifier containing NaCl solution and a humidifier containing deionized water, both connected on the cathode side. The decontamination device effectively removed impurities (Na+ and Cl-) during experiments. As a result, the electrochemical performance of the fuel cell with the decontamination device improved compared to that of the fuel cell without it. Notably, the activation resistance and electrochemical surface area were significantly enhanced, and the ohmic resistance also improved when compared to the fuel cell without the decontamination device.

Citations

Citations to this article as recorded by  Crossref logo
  • Effects of NaCl Solution on Proton Exchange Membrane Fuel Cell with Serpentine Flow Channel of Different Depths
    Dong Kun Song, Ho Jun Yoo, Jung Soo Kim, Ki Won Hong, Do Young Jung, George Ilhwan Park, Gu Young Cho
    Journal of the Korean Society for Precision Engineering.2025; 42(5): 399.     CrossRef
  • Fuel Cell–Battery Hybrid Power System for Autonomous Agricultural Vehicles
    YERIM KWON, GUYOUNG CHO, SEUNGJIN YU, SANGHO LEE
    Transactions of the Korean Hydrogen and New Energy Society.2025; 36(6): 748.     CrossRef
  • 148 View
  • 3 Download
  • Crossref
Cutting of Chemically Strengthened Glass Using the Combination of Electrochemical Discharge and Grinding Processes
Jonghwan Kim, Jihong Hwang
J. Korean Soc. Precis. Eng. 2024;41(12):957-964.
Published online December 1, 2024
DOI: https://doi.org/10.7736/JKSPE.024.096
Chemically strengthened glass has recently gained attention for use in mobile device display covers due to its enhanced mechanical properties. However, cutting chemically strengthened glass poses challenges because of its high surface compressive stress, derived from the ion exchange between Na+ and K+ during the strengthening process. To address this, we propose an efficient method for cutting chemically strengthened glass by integrating electrochemical discharge (ECD) and grinding processes. The ECD process helps alleviate surface compressive stress through reverse ion exchange, while the grinding process helps mitigate compressive stress on the bottom surface without flipping the glass. Chemical composition analysis of the cross-section of glass cut along the line treated by the ECD process revealed that this method can induce reverse ion exchange on both the upper and bottom surfaces of chemically strengthened glass. Furthermore, nano-indentation hardness tests conducted on the cross-section demonstrated that the subsurface hardness could be reduced by the ECD process, indicating a relaxation of the surface compressive layers. It has also been proven that chemically strengthened glass can be successfully cut using this method, suggesting it offers a viable solution for efficient glass cutting.

Citations

Citations to this article as recorded by  Crossref logo
  • High-quality freeform machining of chemically strengthened glass using spark assisted chemical engraving
    Seyed Ali Delbari, Jean-Philippe Leclair, Guillaume Villeneuve, Lucas A. Hof
    Results in Engineering.2026; 29: 109591.     CrossRef
  • 56 View
  • 1 Download
  • Crossref
2-step CMP Strategy for Dishing Control of TGV Interposers
Seunghun Jeong, Yeongil Shin, Jongmin Jeong, Seonho Jeong, Haedo Jeong
J. Korean Soc. Precis. Eng. 2024;41(6):467-472.
Published online June 1, 2024
DOI: https://doi.org/10.7736/JKSPE.024.027
Chemical mechanical planarization (CMP) is an essential polishing process in semiconductor manufacturing. Advances in memory technology, including increased capacity and performance, have increased the importance of electronic packaging. In heterogeneous integration, the interposer acts as an important intermediary between the logic die and the substrate, solving numerous I/O bump problems in high-bandwidth memory (HBM) and logic chips. Traditionally, board-to-memory connections were made through wire bonding, which required additional space for wire connections and introduced latency due to extended signal transmission paths. A through-type approach has emerged as a solution that can significantly reduce waiting time and installation space by improving space efficiency and enabling vertical connections without extending wiring. Due to these new approaches, the importance of CMP is reemerging. Implementation of this important process requires precise control of the CMP dishing/protrusion of bonding surfaces. Improper selection of Cu pad dishing/protrusion can cause problems such as increased RC delay time and signal short circuit in the wiring. In this paper, we proposed a strategy to control dishing using CMP, especially for Through-glass-via (TGV).
  • 67 View
  • 2 Download
Structural Analysis and Optimization of Electrochemical Hydrogen Compressor End Plate Using Taguchi Method and Gray Relational Analysis
Sang Duk Seo, Won Tae Kwon
J. Korean Soc. Precis. Eng. 2023;40(12):955-964.
Published online December 1, 2023
DOI: https://doi.org/10.7736/JKSPE.023.083
The Electrochemical Hydrogen Compressor is an optimal device for compressing low-pressure hydrogen to high-pressure hydrogen. It has a similar structure to the Proton Exchange Membrane Fuel Cell but operates at extremely high pressures, requiring multiple cells sealed with End Plates. The End Plate design must provide initial cell activation support, withstand maximum operating pressure within the stack, and prevent internal gas leakage. This study applies a multi-objective optimization method and grey relation analysis to determine the optimal design parameters for the End Plate based on the activation area of Dummy Cells. Finite Element Method (FEM) analysis is conducted to verify the effectiveness of the optimized End Plate design, considering the uniform pressure distribution with stacked Dummy Cells (1, 3, 6, 12). The analysis reveals that the parameters affecting the uniform pressure distribution include the End Plate design, stack sealing pressure, individual Cell design parameters, and the number of Cell stack layers.
  • 60 View
  • 0 Download
Evaluate the Activation Effect according to the Voltage Range
Jung Soo Kim, Ho Jun Yoo, Ji Woong Jeon, Dong Kun Song, Ye Rim Kwon, Young Jo Lee, Seung Hyeok Hong, Su Min Lee, Da Hye Geum, Gu Young Cho
J. Korean Soc. Precis. Eng. 2023;40(10):847-852.
Published online October 1, 2023
DOI: https://doi.org/10.7736/JKSPE.023.056
Polymer electrolyte membrane fuel cells (PEMFC) require activation to maximize their performance. Thus, an appropriate activation process is essential for the performance of the fuel cell. In this study, the performance of the fuel cell was investigated by changing the voltage range during the activation process. There were three voltage ranges: 0.3-0.9 V, 0.3-0.6 V, and 0.6-0.9 V. When the fuel cell was activated in the low voltage region, the highest performance was output. On the other hand, it showed the lowest performance at high voltage. The results suggest that it is advantageous to activate the fuel cell with a high current. On the other hand, if activation is performed while outputting at a low current, the generation of water and the electrochemical reaction are insufficient, resulting in a load on the fuel cell. Through this experiment, it was confirmed that the control method greatly affects fuel cell performance when activated.
  • 63 View
  • 0 Download
A Study on Electrochemical Resistance Change through the Pressurization Process of MEA for PEMFC
Ye Rim Kwon, Dong Kun Song, Ho Jun Yoo, Gye Eun Jang, Young Jo Lee, Jung Soo Kim, Ji Woong Jeon, Da hae Guem, Gu Young Cho
J. Korean Soc. Precis. Eng. 2023;40(7):539-544.
Published online July 1, 2023
DOI: https://doi.org/10.7736/JKSPE.022.150
In this study, the electrochemical characteristics of fuel cell were evaluated after applying a compressive load to the activation area of membrane electrode assembly (MEA) in polymer electrolyte membrane fuel cells. The effects of the pressed area under the compressive load were systematically investigated using polarization curves and electrochemical impedance spectroscopies (EIS) of the fuel cell. Interestingly, the performance of the fuel cell was improved as the pressed area of the MEA was increased from 25.2% to 100% of the active area. In addition, the increased pressed area led to a decrease in the ohmic resistance and the activation resistance of fuel cells.
  • 65 View
  • 0 Download
Prediction of CMP Material Removal Rate based on Pad Surface Roughness Using Deep Neural Network
Jong Min Jeong, Seon Ho Jeong, Yeong Il Shin, Young Wook Park, Hae Do Jeong
J. Korean Soc. Precis. Eng. 2023;40(1):21-29.
Published online January 1, 2023
DOI: https://doi.org/10.7736/JKSPE.022.119
As the digitization of the manufacturing process is accelerating, various data-driven approaches using machine learning are being developed in chemical mechanical polishing (CMP). For a more accurate prediction in contact-based CMP, it is necessary to consider the real-time changing pad surface roughness during polishing. Changes in pad surface roughness result in non-uniformity of the real contact pressure and friction applied to the wafer, which are the main causes of material removal rate variation. In this paper, we predicted the material removal rate based on pressure and surface roughness using a deep neural network (DNN). Reduced peak height (Rpk) and real contact area (RCA) were chosen as the key parameters indicative of the surface roughness of the pad, and 220 data were collected along with the process pressure. The collected data were normalized and separated in a 3 : 1 : 1 ratio to improve the predictive performance of the DNN model. The hyperparameters of the DNN model were optimized through random search techniques and 5 cross-validations. The optimized DNN model predicted the material removal rate with high accuracy in ex-situ CMP. This study is expected to be utilized in data-driven machine learning decision making for cyber-physical CMP systems in the future.

Citations

Citations to this article as recorded by  Crossref logo
  • Precision Engineering and Intelligent Technologies for Predictable CMP
    Somin Shin, Hyun Jun Ryu, Sanha Kim, Haedo Jeong, Hyunseop Lee
    International Journal of Precision Engineering and Manufacturing.2025; 26(9): 2121.     CrossRef
  • Prediction of Normalized Material Removal Rate Profile Based on Deep Neural Network in Five-Zone Carrier Head CMP System
    Yonsang Cho, Myeongjun Kim, Munyoung Hong, Joocheol Han, Hong Jin Kim, Hyunki Kim, Hyunseop Lee
    International Journal of Precision Engineering and Manufacturing-Green Technology.2025; 12(3): 869.     CrossRef
  • 聚氨酯抛光垫特性对化学机械抛光性能的影响研究进展(特邀)
    侯长余 HOU Changyu, 吴涛 WU Tao, 李凯强 LI Kaiqiang, 周平 ZHOU Ping, 郭东明 GUO Dongming
    Infrared and Laser Engineering.2025; 54(9): 20250336.     CrossRef
  • 124 View
  • 10 Download
  • Crossref
Analysis of Electrochemical Behavior of PEMFC Humidified with NaCl Solution Mist Using an Ultrasonic Vibrator
Ho Jun Yoo, Gye Eun Jang, Young Jo Lee, Dong Kun Song, Heeyun Lee, Gu Young Cho
J. Korean Soc. Precis. Eng. 2022;39(12):939-946.
Published online December 1, 2022
DOI: https://doi.org/10.7736/JKSPE.022.096
Durability evaluations were conducted using polymer electrolyte membrane fuel cells in a marine environment. Deionised water and 3.5 wt% of NaCl solution were supplied to the cathode using an ultrasonic vibrator. Performance and electrochemical impedance spectroscopy of fuel cells were measured to evaluate the electrochemical behaviors. Additionally, long-term stability evaluations of PEMFCs were carried out at 0.65 V for 20 h. Following the experiments, scanning electron microscope analysis was conducted to confirm the presence of NaCl on membrane electrode assembly and micro porous layer of fuel cells.

Citations

Citations to this article as recorded by  Crossref logo
  • Effects of NaCl Solution on Proton Exchange Membrane Fuel Cell with Serpentine Flow Channel of Different Depths
    Dong Kun Song, Ho Jun Yoo, Jung Soo Kim, Ki Won Hong, Do Young Jung, George Ilhwan Park, Gu Young Cho
    Journal of the Korean Society for Precision Engineering.2025; 42(5): 399.     CrossRef
  • Evaluation of Electrochemical Performance of PEMFCs with Decontamination Devices at Marine Environments
    Ye rim Kwon, Ho Jun Yoo, Byung Gyu Kang, Ki Won Hong, Sun Ki Kwon, Sanghoon Lee, Gu Young Cho
    Journal of the Korean Society for Precision Engineering.2025; 42(1): 57.     CrossRef
  • A Study of Effects of the Repetition of Assembly and the Addition of Activation on Electrochemical Characteristics of PEMFCs
    Ji Woong Jeon, Gye Eun Jang, Young Jo Lee, Dong Kun Song, Ho Jun Yoo, Seung Hyeok Hong, Jung Soo Kim, Ye Rim Kwon, Da Hye Geum, Gu Young Cho
    Journal of the Korean Society for Precision Engineering.2023; 40(11): 867.     CrossRef
  • A Study on Electrochemical Resistance Change through the Pressurization Process of MEA for PEMFC
    Ye Rim Kwon, Dong Kun Song, Ho Jun Yoo, Gye Eun Jang, Young Jo Lee, Jung Soo Kim, Ji Woong Jeon, Da hae Guem, Gu Young Cho
    Journal of the Korean Society for Precision Engineering.2023; 40(7): 539.     CrossRef
  • 81 View
  • 0 Download
  • Crossref
Effect of Slurry Film Thickness Variation according to Spray Range Using Ultrasonic Spray Nozzle on Material Removal Rate
Seongnyeong Heo, Seonho Jeong, Minji Kim, Youngwook Park, Haedo Jeong
J. Korean Soc. Precis. Eng. 2022;39(9):675-682.
Published online September 1, 2022
DOI: https://doi.org/10.7736/JKSPE.022.036
Most of the consumables used in the CMP (Chemical Mechanical Planarization) process are discarded because it is difficult to reuse them. Slurry accounts for most of the consumables, so research is being conducted to reduce the amount of slurry used. A previous study explains that when the same amount of slurry is injected, the material removal rate is improved when the slurry is injected wide and thin instead of the tube nozzle, which is the conventional slurry injection method. However, there was no change in the injection method due to the problems of the injection method suggested in previous studies and the lack of follow-up studies. Thus, in this paper, an injection method through an ultrasonic spray nozzle is proposed to improve the problems of the injection method proposed in previous studies. Additionally, it is intended to calculate the slurry film thickness according to the spraying range and to explain the effect of the film thickness on the material removal rate.
  • 54 View
  • 0 Download